Barium Zirconate Sputtering Target

CAS #:

Linear Formula:

BaZrO3

MDL Number:

MFCD00014189

EC No.:

234-546-8

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PRODUCT Product Code ORDER SAFETY DATA TECHNICAL DATA
(2N) 99% Barium Zirconate Sputtering Target
BA-ZRO-02-ST
Pricing > SDS > Data Sheet >
(3N) 99.9% Barium Zirconate Sputtering Target
BA-ZRO-03-ST
Pricing > SDS > Data Sheet >
(4N) 99.99% Barium Zirconate Sputtering Target
BA-ZRO-04-ST
Pricing > SDS > Data Sheet >
(5N) 99.999% Barium Zirconate Sputtering Target
BA-ZRO-05-ST
Pricing > SDS > Data Sheet >

Barium Zirconate Sputtering Target Properties (Theoretical)

Compound Formula BaO3Zr
Molecular Weight 276.55
Appearance Off-white target
Melting Point N/A
Boiling Point N/A
Density 5.52 g/cm3
Solubility in H2O N/A
Exact Mass 275.794689
Monoisotopic Mass 275.794689

Barium Zirconate Sputtering Target Health & Safety Information

Signal Word Warning
Hazard Statements H302-H332
Hazard Codes Xn
Risk Codes 20/22
Safety Statements 28
RTECS Number CR0875000
Transport Information N/A
WGK Germany 1

View and Print SDS

SAFETY DATA SHEET

Date Accessed: 12/20/2024
Date Revised:01/15/2022

SECTION 1. IDENTIFICATION

Product Name: Barium Zirconate Sputtering Target

Product Number: All applicable American Elements product codes, e.g. BA-ZRO-02-ST , BA-ZRO-03-ST , BA-ZRO-04-ST , BA-ZRO-05-ST

CAS #: 12009-21-1

Relevant identified uses of the substance: Scientific research and development

Supplier details:
American Elements
10884 Weyburn Ave.
Los Angeles, CA 90024
Tel: +1 310-208-0551
Fax: +1 310-208-0351

Emergency telephone number:
Domestic, North America: +1 800-424-9300
International: +1 703-527-3887


SECTION 2. HAZARDS IDENTIFICATION

Classification of the substance or mixture in accordance with 29 CFR 1910 (OSHA HCS)
GHS07
Acute Tox. 4 H302 Harmful if swallowed.
Acute Tox. 4 H332 Harmful if inhaled.
Hazards not otherwise classified No data available
GHS label elements, including precautionary statements
Hazard pictograms

Exclamation Mark - GHS07

GHS07
Signal word Warning
Hazard statements
H302+H332 Harmful if swallowed or if inhaled.
Precautionary statements
P261 Avoid breathing dust/fume/gas/mist/vapors/spray.
P264 Wash thoroughly after handling.
P304+P340 IF INHALED: Remove person to fresh air and keep comfortable for breathing.
P301+P312 IF SWALLOWED: Call a POISON CENTER/doctor/if you feel unwell.
P312 Call a POISON CENTER/doctor/if you feel unwell.
P501 Dispose of contents/container in accordance with local/regional/national/international regulations.
WHMIS classification
D1B - Toxic material causing immediate and serious toxic effects
Classification system
HMIS ratings (scale 0-4)
(Hazardous Materials Identification System)
HEALTH
FIRE
REACTIVITY
2


Health (acute effects) = 2
Flammability = 0
Physical Hazard = 0
Other hazards
Results of PBT and vPvB assessment
PBT: N/A
vPvB: N/A


SECTION 3. COMPOSITION/INFORMATION ON INGREDIENTS

Substances
CAS No. / Substance Name:
12009-21-1 Barium zirconium oxide
Identification number(s):
EC number: 234-546-8
Index number: 056-002-00-7
Additional information: Zirconium is routinely found with a low level of hafnium since separation of the two elements is difficult.


SECTION 4. FIRST AID MEASURES

Description of first aid measures
If inhaled:
Supply patient with fresh air. If not breathing, provide artificial respiration. Keep patient warm.
Seek immediate medical advice.
Description of first aid measures
If inhaled:
Supply patient with fresh air. If not breathing, provide artificial respiration. Keep patient warm.
Seek immediate medical advice.


SECTION 5. FIREFIGHTING MEASURES

Extinguishing media
Suitable extinguishing agents Product is not flammable. Use fire-fighting measures that suit the surrounding fire.
Special hazards arising from the substance or mixture
If this product is involved in a fire, the following can be released:
Barium oxide
Metal oxide fume
Advice for firefighters
Protective equipment:
Wear self-contained respirator.
Wear fully protective impervious suit.


SECTION 6. ACCIDENTAL RELEASE MEASURES

Personal precautions, protective equipment and emergency procedures
Use personal protective equipment. Keep unprotected persons away.
Ensure adequate ventilation
Environmental precautions: Do not allow material to be released to the environment without official permits.
Methods and materials for containment and cleanup:
Dispose of contaminated material as waste according to section 13.
Ensure adequate ventilation.
Prevention of secondary hazards: No special measures required.
Reference to other sections
See Section 7 for information on safe handling
See Section 8 for information on personal protection equipment.
See Section 13 for disposal information.


SECTION 7. HANDLING AND STORAGE

Handling
Precautions for safe handling
Keep container tightly sealed.
Store in cool, dry place in tightly closed containers.
Ensure good ventilation at the workplace.
Information about protection against explosions and fires: The product is not flammable
Conditions for safe storage, including any incompatibilities
Requirements to be met by storerooms and receptacles: No special requirements.
Information about storage in one common storage facility: Store away from oxidizing agents.
Further information about storage conditions:
Keep container tightly sealed.
Store in cool, dry conditions in well-sealed containers.
Specific end use(s) No data available


SECTION 8. EXPOSURE CONTROLS/PERSONAL PROTECTION

Additional information about design of technical systems:
Properly operating chemical fume hood designed for hazardous chemicals and having an average face velocity of at least 100 feet per minute.
Control parameters
Components with limit values that require monitoring at the workplace:
Barium, and soluble compounds, as Ba
mg/m3
ACGIH TLV 0.5; Not classified as a human carcinogen
Austria MAK 0.5
Belgium TWA 0.5
Denmark TWA 0.5
Finland TWA 0.5
Germany MAK 0.5 (total dust)
Hungary 0.5-STEL
Ireland TWA 0.5
Korea TLV 0.5
Netherlands MAC-TGG 0.5
Norway TWA 0.5
Poland TWA 0.5; 1.5-STEL
Sweden TWA 0.5
Switzerland MAK-W 0.5
United Kingdom LTEL 0.5
USA PEL 0.5
Zirconium and compounds, as Zr
mg/m3
ACGIH TLV 10; 10-STEL, Not classifiable as human carcinogen
Australia TWA 5; 10-STEL
Austria MAK 5
Denmark TWA 5
Finland TWA 5
Korea TLV 5
Hungary 5-STEL
Poland TWA 5; 10-STEL
Russia 6-STEL
OSHA PEL 5
Additional information: No data
Exposure controls
Personal protective equipment
Follow typical protective and hygienic practices for handling chemicals.
Keep away from foodstuffs, beverages and feed.
Remove all soiled and contaminated clothing immediately.
Wash hands before breaks and at the end of work.
Maintain an ergonomically appropriate working environment.
Breathing equipment: Use suitable respirator when high concentrations are present.
Protection of hands:
Impervious gloves
Inspect gloves prior to use.
The selection of suitable gloves not only depends on the material, but also on quality. Quality will vary from manufacturer to manufacturer.
Eye protection: Safety glasses
Body protection: Protective work clothing.


SECTION 9. PHYSICAL AND CHEMICAL PROPERTIES

Information on basic physical and chemical properties
Appearance:
Form: Powder or solid in various forms
Color: Off-white
Odor: Odorless
Odor threshold: No data available.
pH: N/A
Melting point/Melting range: 2500 °C (4532 °F)
Boiling point/Boiling range: No data available
Sublimation temperature / start: No data available
Flash point: N/A
Flammability (solid, gas) No data available.
Ignition temperature: No data available
Decomposition temperature: No data available
Autoignition: No data available.
Danger of explosion: Product does not present an explosion hazard.
Explosion limits:
Lower: No data available
Upper: No data available
Vapor pressure: N/A
Density at 20 °C (68 °F): 5.52 g/cm3 (46.064 lbs/gal)
Relative density No data available.
Vapor density N/A
Evaporation rate N/A
Solubility in / Miscibility with
Water: No data available
Partition coefficient (n-octanol/water): No data available.
Viscosity:
Dynamic: N/A
Kinematic: N/A
Other information No data available


SECTION 10. STABILITY AND REACTIVITY

Reactivity No data available
Chemical stability Stable under recommended storage conditions.
Thermal decomposition / conditions to be avoided: Decomposition will not occur if used and stored according to specifications.
Possibility of hazardous reactions No dangerous reactions known
Conditions to avoid No data available
Incompatible materials: Oxidizing agents
Hazardous decomposition products:
Barium oxide
Metal oxide fume


SECTION 11. TOXICOLOGICAL INFORMATION

Information on toxicological effects
Acute toxicity:
Harmful if inhaled.
Harmful if swallowed.
LD/LC50 values that are relevant for classification: No data
Skin irritation or corrosion: Irritant to skin and mucous membranes.
Eye irritation or corrosion: Irritating effect.
Sensitization: No sensitizing effects known.
Germ cell mutagenicity: No effects known.
Carcinogenicity:
EPA-D: Not classifiable as to human carcinogenicity: inadequate human and animal evidence of carcinogenicity or no data are available.
ACGIH A4: Not classifiable as a human carcinogen: Inadequate data on which to classify the agent in terms of its carcinogenicity in humans and/or animals.
Reproductive toxicity: No effects known.
Specific target organ system toxicity - repeated exposure: No effects known.
Specific target organ system toxicity - single exposure: No effects known.
Aspiration hazard: No effects known.
Subacute to chronic toxicity:
Barium compounds may cause severe gastroenteritis, including abdominal pain, vomiting and diarrhea, tremors, faintness, paralysis of the arms and legs, and slow
or irregular heartbeat. Severe cases may produce collapse and death due to respiratory failure. Soluble barium compounds are more likely to cause these effects
than insoluble compounds. Inhalation of fumes may cause sore throat, coughing, labored breathing, and irritation of the respiratory tract as well as the above
symptoms.
Inhalation of zirconium and zirconium compounds may cause pulmonary granulomas.
Subacute to chronic toxicity:
The Registry of Toxic Effects of Chemical Substances (RTECS) reports the following effects in laboratory animals:
Nutritional and Gross Metabolic - weight loss or decreased weight gain.
Lungs, Thorax, or Respiration - changes in pulmonary vascular resistance.
Lungs, Thorax, or Respiration - fibrosis, focal (pneumoconiosis).
Lungs, Thorax, or Respiration - pleural thickening
Additional toxicological information: To the best of our knowledge the acute and chronic toxicity of this substance is not fully known.


SECTION 12. ECOLOGICAL INFORMATION

Toxicity
Aquatic toxicity: No data available
Persistence and degradability No data available
Bioaccumulative potential No data available
Mobility in soil No data available
Additional ecological information:
Do not allow material to be released to the environment without official permits.
Do not allow undiluted product or large quantities to reach groundwater, water courses, or sewage systems.
Avoid transfer into the environment.
Results of PBT and vPvB assessment
PBT: N/A
vPvB: N/A
Other adverse effects No data available


SECTION 13. DISPOSAL CONSIDERATIONS

Waste treatment methods
Recommendation Consult official regulations to ensure proper disposal.
Uncleaned packagings:
Recommendation: Disposal must be made according to official regulations.


SECTION 14. TRANSPORT INFORMATION

Not a hazardous material for transportation.
UN-Number
DOT, IMDG, IATA None
UN proper shipping name
DOT, IMDG, IATA None
Transport hazard class(es)
DOT, ADR, IMDG, IATA
Class None
Packing group
DOT, IMDG, IATA None
Environmental hazards: N/A
Special precautions for user N/A
Transport in bulk according to Annex II of MARPOL73/78 and the IBC Code N/A
Transport/Additional information: Not dangerous according to the above specifications.
DOT
Marine Pollutant (DOT): No


SECTION 15. REGULATORY INFORMATION

Safety, health and environmental regulations/legislation specific for the substance or mixture
GHS label elements, including precautionary statements
Hazard pictograms
GHS07
Signal word Warning
Hazard statements
H302+H332 Harmful if swallowed or if inhaled.
Precautionary statements
P261 Avoid breathing dust/fume/gas/mist/vapors/spray.
P264 Wash thoroughly after handling.
P304+P340 IF INHALED: Remove person to fresh air and keep comfortable for breathing.
P301+P312 IF SWALLOWED: Call a POISON CENTER/doctor/if you feel unwell.
P312 Call a POISON CENTER/doctor/if you feel unwell.
P501 Dispose of contents/container in accordance with local/regional/national/international regulations.
National regulations
All components of this product are listed in the U.S. Environmental Protection Agency Toxic Substances Control Act Chemical substance Inventory.
All components of this product are listed on the Canadian Non-Domestic Substances List (NDSL).
SARA Section 313 (specific toxic chemical listings)
12009-21-1 Barium zirconium oxide
California Proposition 65
Prop 65 - Chemicals known to cause cancer Substance is not listed.
Prop 65 - Developmental toxicity Substance is not listed.
Prop 65 - Developmental toxicity, female Substance is not listed.
Prop 65 - Developmental toxicity, male Substance is not listed.
Information about limitation of use:
For use only by technically qualified individuals.
This product contains barium and is subject to the reporting requirements of section 313 of the Emergency Planning and Community Right to Know Act of 1986 and
40CFR372.
Other regulations, limitations and prohibitive regulations
Substance of Very High Concern (SVHC) according to the REACH Regulations (EC) No. 1907/2006. Substance is not listed.
The conditions of restrictions according to Article 67 and Annex XVII of the Regulation (EC) No 1907/2006 (REACH) for the manufacturing, placing on the market and use must be observed.
Substance is not listed.
Annex XIV of the REACH Regulations (requiring Authorisation for use) Substance is not listed.
Chemical safety assessment: A Chemical Safety Assessment has not been carried out.


SECTION 16. OTHER INFORMATION

Safety Data Sheet according to Regulation (EC) No. 1907/2006 (REACH). The above information is believed to be correct but does not purport to be all inclusive and shall be used only as a guide. The information in this document is based on the present state of our knowledge and is applicable to the product with regard to appropriate safety precautions. It does not represent any guarantee of the properties of the product. American Elements shall not be held liable for any damage resulting from handling or from contact with the above product. See reverse side of invoice or packing slip for additional terms and conditions of sale. COPYRIGHT 1997-2022 AMERICAN ELEMENTS. LICENSED GRANTED TO MAKE UNLIMITED PAPER COPIES FOR INTERNAL USE ONLY.

About Barium Zirconate Sputtering Target

High Purity (99.99%) Barium Zirconate Sputtering TargetAmerican Elements specializes in producing high purity Barium Zirconate Sputtering Targets with the highest possible density and smallest possible average grain sizes for use in semiconductor, chemical vapor deposition (CVD) and physical vapor deposition (PVD) display and optical applications. Our standard Sputtering Targets for thin film are available monoblock or bonded with planar target dimensions and configurations up to 820 mm with hole drill locations and threading, beveling, grooves and backing designed to work with both older sputtering devices as well as the latest process equipment, such as large area coating for solar energy or fuel cells and flip-chip applications. We offer all shapes and configurations of targets compatible with all standard guns including circular, rectangular, annular, oval, "dog-bone," rotatable (rotary), multi-tiled and others in standard, custom, and research sized dimensions. All targets are analyzed using best demonstrated techniques including X-Ray Fluorescence (XRF), Glow Discharge Mass Spectrometry (GDMS), and Inductively Coupled Plasma (ICP). "Sputtering" allows for thin film deposition of an ultra high purity sputtering metallic or oxide material onto another solid substrate by the controlled removal and conversion of the target material into a directed gaseous/plasma phase through ionic bombardment. Materials are produced using crystallization, solid state and other ultra high purification processes such as sublimation. American Elements specializes in producing custom compositions for commercial and research applications and for new proprietary technologies. Please contact us for information on lead time and pricing above.

Barium Zirconate Sputtering Target Synonyms

Barium zirconium oxide, barium zirconium(IV) oxide, barium zirconium trioxide

Chemical Identifiers

Linear Formula BaZrO3
MDL Number MFCD00014189
EC No. 234-546-8
Beilstein/Reaxys No. N/A
Pubchem CID 197132
IUPAC Name barium(2+); oxygen(2-); zirconium(4+)
SMILES [Ba+2].[O-][Zr]([O-])=O
InchI Identifier InChI=1S/Ba.3O.Zr/q+2;;2*-1;
InchI Key DQBAOWPVHRWLJC-UHFFFAOYSA-N

Packaging Specifications

Typical bulk packaging includes palletized plastic 5 gallon/25 kg. pails, fiber and steel drums to 1 ton super sacks in full container (FCL) or truck load (T/L) quantities. Research and sample quantities and hygroscopic, oxidizing or other air sensitive materials may be packaged under argon or vacuum. Shipping documentation includes a Certificate of Analysis and Safety Data Sheet (SDS). Solutions are packaged in polypropylene, plastic or glass jars up to palletized 440 gallon liquid totes, and 36,000 lb. tanker trucks.

Payment Methods

American Elements accepts checks, wire transfers, ACH, most major credit and debit cards (Visa, MasterCard, AMEX, Discover) and Paypal.

For the convenience of our international customers, American Elements offers the following additional payment methods:

SOFORT bank tranfer payment for Austria, Belgium, Germany and SwitzerlandJCB cards for Japan and WorldwideBoleto Bancario for BraziliDeal payments for the Netherlands, Germany, Austria, Belgium, Italy, Poland, Spain, Switzerland, and the United KingdomGiroPay for GermanyDankort cards for DenmarkElo cards for BrazileNETS for SingaporeCartaSi for ItalyCarte-Bleue cards for FranceChina UnionPayHipercard cards for BrazilTROY cards for TurkeyBC cards for South KoreaRuPay for India

Related Elements

Barium

See more Barium products. Barium (atomic symbol: Ba, atomic number: 56) is a Block S, Group 2, Period 6 element with an atomic weight of 137.27. The number of electrons in each of barium's shells is [2, 8, 18, 18, 8, 2] and its electron configuration is [Xe] 6s2. Barium Bohr ModelBarium is a member of the alkaline-earth metals. The barium atom has a radius of 222 pm and a Van der Waals radius of 268 pm. Barium was discovered by Carl Wilhelm Scheele in 1772 and first isolated by Humphry Davy in 1808. Elemental BariumIn its elemental form, barium is a soft, silvery-gray metal. Industrial applications for barium include acting as a "getter," or unwanted gas remover, for vacuum tubes, and as an additive to steel and cast iron. Barium is also alloyed with silicon and aluminum in load-bearing alloys. The main commercial source of barium is the mineral barite (BaSO4); it does not occur naturally as a free element . The name barium is derived from the Greek word "barys," meaning heavy.

Zirconium

See more Zirconium products. Zirconium (atomic symbol: Zr, atomic number: 40) is a Block D, Group 4, Period 5 element with an atomic weight of 91.224. Zirconium Bohr ModelThe number of electrons in each of Zirconium's shells is 2, 8, 18, 10, 2 and its electron configuration is [Kr]4d2 5s2. The zirconium atom has a radius of 160 pm and a Van der Waals radius of 186 pm. Zirconium was discovered by Martin Heinrich Klaproth in 1789 and first isolated by Jöns Jakob Berzelius in 1824. In its elemental form, zirconium has a silvery white appearance that is similar to titanium. Zirconium's principal mineral is zircon (zirconium silicate). Elemental ZirconiumZirconium is commercially produced as a byproduct of titanium and tin mining and has many applications as a opacifier and a refractory material. It is not found in nature as a free element. The name of zirconium comes from the mineral zircon, the most important source of zirconium, and from the Persian wordzargun, meaning gold-like.

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