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Calcium Silicate Sputtering Target

CAS #:

1344-95-2

Linear Formula:

CaO • SiO₂

MDL Number:

MFCD00015979

EC No.:

215-710-8

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ORDER

PRODUCT	Product Code	ORDER	SAFETY DATA	TECHNICAL DATA
(2N) 99% Calcium Silicate Sputtering Target	CA-SIAT-02-ST	Pricing >	SDS >	Data Sheet >
(2N5) 99.5% Calcium Silicate Sputtering Target	CA-SIAT-025-ST	Pricing >	SDS >	Data Sheet >
(3N) 99.9% Calcium Silicate Sputtering Target	CA-SIAT-03-ST	Pricing >	SDS >	Data Sheet >
(3N5) 99.95% Calcium Silicate Sputtering Target	CA-SIAT-035-ST	Pricing >	SDS >	Data Sheet >
(4N) 99.99% Calcium Silicate Sputtering Target	CA-SIAT-04-ST	Pricing >	SDS >	Data Sheet >
(5N) 99.999% Calcium Silicate Sputtering Target	CA-SIAT-05-ST	Pricing >	SDS >	Data Sheet >

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Calcium Silicate Sputtering Target Properties (Theoretical)

Compound Formula	CaO₃Si
Molecular Weight	116.16
Appearance	solid
Melting Point	N/A
Boiling Point	N/A
Density	2.9 g/cm³
Solubility in H2O	N/A
Exact Mass	N/A
Monoisotopic Mass	115.924263
Charge	N/A

Calcium Silicate Sputtering Target Health & Safety Information

Signal Word	Warning
Hazard Statements	H319-H335
Hazard Codes	Xi
Risk Codes	36/37
Safety Statements	22-26-37/39
RTECS Number	VV9170000
Transport Information	N/A
WGK Germany	3

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SAFETY DATA SHEET

Date Accessed: 12/21/2024

Date Revised:01/15/2022

SECTION 1. IDENTIFICATION

Product Name: Calcium Silicate Sputtering Target

Product Number: All applicable American Elements product codes, e.g. CA-SIAT-02-ST , CA-SIAT-025-ST , CA-SIAT-03-ST , CA-SIAT-035-ST , CA-SIAT-04-ST , CA-SIAT-05-ST

CAS #: 1344-95-2

Relevant identified uses of the substance: Scientific research and development

Supplier details:
American Elements
10884 Weyburn Ave.
Los Angeles, CA 90024
Tel: +1 310-208-0551
Fax: +1 310-208-0351

Emergency telephone number:
Domestic, North America: +1 800-424-9300
International: +1 703-527-3887

SECTION 2. HAZARDS IDENTIFICATION

Classification of the substance or mixture
GHS Classification in accordance with 29 CFR 1910 (OSHA HCS)
Eye irritation(Category 2A), H319
Specific target organ toxicity -single exposure(Category 3), Respiratory system, H335

GHS Label elements, including precautionary statements
Pictogram

Signal word
Warning
Hazard statement(s)
H319
Causes serious eye irritation.
H335
May cause respiratory irritation.
Precautionary statement(s)
P261
Avoid breathing dust/ fume/ gas/ mist/ Vapors/ spray.
P264
Wash skin thoroughly after handling.
P271
Use only outdoors or in a well-ventilated area.
P280
Wear protective gloves/ eye protection/ face protection.
P304 + P340
IF INHALED: Remove victim to fresh air and keep at rest in a position comfortable for breathing.
P305 + P351 + P338
IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing.
P312
Call a POISON CENTER or doctor/ physician if you feel unwell.
P337 + P313
If eye irritation persists: Get medical advice/ attention.
P403 + P233
Store in a well-ventilated place. Keep container tightly closed.
P405
Store locked up.
P501
Dispose of contents/ container to an approved waste disposal plant.
Hazards not otherwise classified (HNOC) or not covered by GHS-none

SECTION 3. COMPOSITION/INFORMATION ON INGREDIENTS

Substances
Synonyms:
Calcium metasilicate
Calcium silicon oxide
Silicon calcium oxide
Formula: CaO3Si
Molecular Weight: 116.16 g/mol
CAS-No.: 1344-95-2
EC-No.: 233-250-6
Component
Calcium silicate
Classification
Eye Irrit.2A; STOT SE3; H319, H335
Concentration
-

SECTION 4. FIRST AID MEASURES

Description of first aid measures
General advice
Consult a physician. Show this safety data sheet to the doctor in attendance.
Move out of dangerous area.
If inhaled
If breathed in, move person into fresh air. If not breathing, give artificial respiration. Consult a physician.
In case of skin contact
Wash off with soap and plenty of water. Consult a physician.
In case of eye contact
Rinse thoroughly with plenty of water for at least 15 minutes and consult a physician.
If swallowed
Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician.
Most important symptoms and effects, both acute and delayed
The most important known symptoms and effects are described in the labelling (see section 2) and/or in section 11
Indication of any immediate medical attention and special treatment needed
no data available

SECTION 5. FIREFIGHTING MEASURES

Extinguishing media
Suitable extinguishing media
Use water spray, alcohol-resistant foam, dry chemical or carbon dioxide.
Special hazards arising from the substance or mixture
Calcium oxide, silicon oxides
Advice for firefighters
Wear self contained breathing apparatus for fire fighting if necessary.
Further information
no data available

SECTION 6. ACCIDENTAL RELEASE MEASURES

Personal precautions, protective equipment and emergency procedures
Use personal protective equipment. Avoid dust formation. Avoid breathing Vapors, mist or gas. Ensure adequate ventilation. Evacuate personnel to safe areas. Avoid breathing dust.
For personal protection see section 8.
Environmental precautions
Do not let product enter drains.
Methods and materials for containment and cleaning up
Pick up and arrange disposal without creating dust. Sweep up and shovel. Keep in suitable, closed containers for disposal.
Reference to other sections
For disposal see section 13.

SECTION 7. HANDLING AND STORAGE

Precautions for safe handling
Avoid contact with skin and eyes. Avoid formation of dust and aerosols.
Provide appropriate exhaust ventilation at places where dust is formed.Normal measures for preventive fire protection.
For precautions see section 2.
Conditions for safe storage, including any incompatibilities
Keep container tightly closed in a dry and well-ventilated place.
Specific end use(s)
Apart from the uses mentioned in section 1 no other specific uses are stipulated

SECTION 8. EXPOSURE CONTROLS/PERSONAL PROTECTION

Control parameters
Components with workplace control parameters
Contains no substances with occupational exposure limit values.
Exposure controls
Appropriate engineering controls
Handle in accordance with good industrial hygiene and safety practice. Wash hands before breaks and at the end of workday.
Personal protective equipment
Eye/face protection
Safety glasses with side-shields conforming to EN166 Use equipment for eye protecti
on tested and approved under appropriate government standards such as NIOSH (US) or EN 166(EU).
Skin protection
Handle with gloves. Gloves must be inspected prior to use. Use proper glove removal technique (without touching glove's outer surface) to avoid skin contact with this product. Dispose of contaminated gloves after use in accordance with applicable laws and good laboratory practices. Wash and dry hands.
Body Protection
impervious clothing, The type of protective equipment must be selected according
to the concentration and amount of the dangerous substance at the specific workplace.
Respiratory protection
For nuisance exposures use type P95 (US) or type P1 (EU EN 143) particle respirator.For higher level protection use type OV/AG/P99 (US) or type ABEK-P2 (EU EN 143) respirator cartridges. Use respirators and components tested and approved under appropriate government standards such as NIOSH (US) or CEN (EU).
Control of environmental exposure
Do not let product enter drains.

SECTION 9. PHYSICAL AND CHEMICAL PROPERTIES

Appearance
Form: solid
Odor
no data available
Odor Threshold
no data available
pH
no data available
Melting point/freezing point
no data available
Initial boiling point and boiling range
no data available
Flash point
not applicable
EVaporation rate
no data available
Flammability (solid, gas)
no data available
Upper/lower flammability or explosive limits
no data available
Vapor pressure
no data available
Vapor density
no data available
Relative density
2.900 g/cm3
Water solubility
no data available
Partition coefficient: n-octanol/water
no data available
Auto-ignition temperature
no data available
Decomposition temperature
no data available
Viscosity
no data available
Explosive properties
no data available
Oxidizing properties
no data available
Other safety information
no data available

SECTION 10. STABILITY AND REACTIVITY

Reactivity
no data available
Chemical stability
Stable under recommended storage conditions.
Possibility of hazardous reactions
no data available
Conditions to avoid
no data available
Incompatible materials
Strong oxidizing agents
Hazardous decomposition products
Other decomposition products-no data available
In the event of fire: see section 5

SECTION 11. TOXICOLOGICAL INFORMATION

Information on toxicological effects
Acute toxicity
no data available
Dermal:
no data available
Skin corrosion/irritation
no data available
Serious eye damage/eye irritation
no data available
Respiratory or skin sensitisation
no data available
Germ cell mutagenicity
no data available
Carcinogenicity
IARC:
No component of this product present at levels greater than or equal to 0.1% is identified as
probable, possible or confirmed human carcinogen by IARC.
ACGIH:
No component of this product present at levels greater than or equal to 0.1% is identified as a
carcinogen or potential carcinogen by ACGIH.
NTP:
No component of this product present at levels greater than or equal to 0.1% is identified as a
known or anticipated carcinogen by NTP.
OSHA:
No component of this product present at levels greater than or equal to 0.1% is identified as a
carcinogen or potential carcinogen by OSHA.
Reproductive toxicity
no data available
Specific target organ toxicity -single exposure
Inhalation-May cause respiratory irritation.
Specific target organ toxicity -repeated exposure
no data available
Aspiration hazard
no data available
Additional Information
RTECS: VV9170000
To the best of our knowledge, the chemical, physical, and toxicological properties have not been thoroughly investigated.

SECTION 12. ECOLOGICAL INFORMATION

Toxicity
no data available
Persistence and degradability
no data available
Bioaccumulative potential
no data available
Mobility in soil
no data available
Results of PBT and vPvB assessment
PBT/vPvB assessment not available as chemical safety assessment not required/not conducted
Other adverse effects
no data available

SECTION 13. DISPOSAL CONSIDERATIONS

Waste treatment methods
Product
Offer surplus and non-recyclable solutions to a licensed disposal company.
Contact a licensed professional waste disposal service to dispose of this material.
Contaminated packaging
Dispose of as unused product.

SECTION 14. TRANSPORT INFORMATION

DOT (US)
Not dangerous goods
IMDG
Not dangerous goods
IATA
Not dangerous goods

SECTION 15. REGULATORY INFORMATION

SARA 302 Components
SARA 302: No chemicals in this material are subject to the reporting requirements of SARA Title III, Section 302.
SARA 313 Components
SARA 313: This material does not contain any chemical components with known CAS numbers that exceed the threshold (De Minimis) reporting levels established by SARA Title III, Section 313.
SARA 311/312 Hazards
Acute Health Hazard
Massachusetts Right To Know Components
No components are subject to the Massachusetts Right to Know Act.
Pennsylvania Right To Know Components
Calcium silicate
CAS-No.
1344-95-2
Revision Date
New Jersey Right To Know Components
Calcium silicate
CAS-No.
1344-95-2
California Prop. 65 Components
This product does not contain any chemicals known to State of California to cause cancer, birth defects, or any other reproductive harm.

SECTION 16. OTHER INFORMATION

Safety Data Sheet according to Regulation (EC) No. 1907/2006 (REACH). The above information is believed to be correct but does not purport to be all inclusive and shall be used only as a guide. The information in this document is based on the present state of our knowledge and is applicable to the product with regard to appropriate safety precautions. It does not represent any guarantee of the properties of the product. American Elements shall not be held liable for any damage resulting from handling or from contact with the above product. See reverse side of invoice or packing slip for additional terms and conditions of sale. COPYRIGHT 1997-2022 AMERICAN ELEMENTS. LICENSED GRANTED TO MAKE UNLIMITED PAPER COPIES FOR INTERNAL USE ONLY.

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About Calcium Silicate Sputtering Target

American Elements specializes in producing high purity Calcium Silicate Sputtering Targets with the highest possible density and smallest possible average grain sizes for use in semiconductor, chemical vapor deposition (CVD) and physical vapor deposition (PVD) display and optical applications. Our standard Sputtering Targets for thin film are available monoblock or bonded with planar target dimensions and configurations up to 820 mm with hole drill locations and threading, beveling, grooves and backing designed to work with both older sputtering devices as well as the latest process equipment, such as large area coating for solar energy or fuel cells and flip-chip applications. Research sized targets are also produced as well as custom sizes and alloys. All targets are analyzed using best demonstrated techniques including X-Ray Fluorescence (XRF), Glow Discharge Mass Spectrometry (GDMS), and Inductively Coupled Plasma (ICP). "Sputtering" allows for thin film deposition of an ultra high purity sputtering metallic or oxide material onto another solid substrate by the controlled removal and conversion of the target material into a directed gaseous/plasma phase through ionic bombardment. Materials are produced using crystallization, solid state and other ultra high purification processes such as sublimation. American Elements specializes in producing custom compositions for commercial and research applications and for new proprietary technologies. American Elements also casts any of the rare earth metals and most other advanced materials into rod, bar or plate form, as well as other machined shapes and through other processes such as nanoparticles and in the form of solutions and organometallics. We also produce Calcium as disc, granules, ingot, pellets, pieces, powder, and rod. Other shapes are available by request.

Calcium Silicate Sputtering Target Synonyms

N/A

Chemical Identifiers

Linear Formula	CaO • SiO₂
MDL Number	MFCD00015979
EC No.	215-710-8
Beilstein/Reaxys No.	N/A
Pubchem CID	26370
IUPAC Name	calcium dioxido(oxo)silane
SMILES	[Ca+2].[O-][Si]([O-])=O
InchI Identifier	InChI=1S/Ca.O3Si/c;1-4(2)3/q+2;-2
InchI Key	OYACROKNLOSFPA-UHFFFAOYSA-N

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Packaging Specifications

Typical bulk packaging includes palletized plastic 5 gallon/25 kg. pails, fiber and steel drums to 1 ton super sacks in full container (FCL) or truck load (T/L) quantities. Research and sample quantities and hygroscopic, oxidizing or other air sensitive materials may be packaged under argon or vacuum. Shipping documentation includes a Certificate of Analysis and Safety Data Sheet (SDS). Solutions are packaged in polypropylene, plastic or glass jars up to palletized 440 gallon liquid totes, and 36,000 lb. tanker trucks.

Payment Methods

American Elements accepts checks, wire transfers, ACH, most major credit and debit cards (Visa, MasterCard, AMEX, Discover) and Paypal.

For the convenience of our international customers, American Elements offers the following additional payment methods:

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