Direct-Liquid-Evaporation Chemical Vapor Deposition of Nanocrystalline Cobalt Metal for Nanoscale Copper Interconnect Encapsulation.

Title Direct-Liquid-Evaporation Chemical Vapor Deposition of Nanocrystalline Cobalt Metal for Nanoscale Copper Interconnect Encapsulation.
Authors J. Feng; X. Gong; X. Lou; R.G. Gordon
Journal ACS Appl Mater Interfaces
DOI 10.1021/acsami.7b01327
Abstract

In advanced microelectronics, precise design of liner and capping layers become critical, especially when it comes to the fabrication of Cu interconnects with dimensions lower than its mean free path. Herein, we demonstrate that direct-liquid-evaporation chemical vapor deposition (DLE-CVD) of Co is a promising method to make liner and capping layers for nanoscale Cu interconnects. DLE-CVD makes pure, smooth, nanocrystalline, and highly conformal Co films with highly controllable growth characteristics. This process allows full Co encapsulation of nanoscale Cu interconnects, thus stabilizing Cu against diffusion and electromigration. Electrical measurements and high-resolution elemental imaging studies show that the DLE-CVD Co encapsulation layer can improve the reliability and thermal stability of Cu interconnects. Also, with the high conductivity of Co, the DLE-CVD Co encapsulation layer have the potential to further decrease the power consumption of nanoscale Cu interconnects, paving the way for Cu interconnects with higher efficiency in future high-end microelectronics.

Citation J. Feng; X. Gong; X. Lou; R.G. Gordon.Direct-Liquid-Evaporation Chemical Vapor Deposition of Nanocrystalline Cobalt Metal for Nanoscale Copper Interconnect Encapsulation.. ACS Appl Mater Interfaces. 2017;9(12):1091410920. doi:10.1021/acsami.7b01327

Related Elements

Cobalt

See more Cobalt products. Cobalt (atomic symbol: Co, atomic number: 27) is a Block D, Group 9, Period 4 element with an atomic weight of 58.933195. Cobalt Bohr ModelThe number of electrons in each of cobalt's shells is 2, 8, 15, 2 and its electron configuration is [Ar]3d7 4s2. The cobalt atom has a radius of 125 pm and a Van der Waals radius of 192 pm. Cobalt was first discovered by George Brandt in 1732. In its elemental form, cobalt has a lustrous gray appearance. Cobalt is found in cobaltite, erythrite, glaucodot and skutterudite ores. Elemental CobaltCobalt produces brilliant blue pigments which have been used since ancient times to color paint and glass. Cobalt is a ferromagnetic metal and is used primarily in the production of magnetic and high-strength superalloys. Co-60, a commercially important radioisotope, is useful as a radioactive tracer and gamma ray source. The origin of the word Cobalt comes from the German word "Kobalt" or "Kobold," which translates as "goblin," "elf" or "evil spirit.

Copper

See more Copper products. Copper Bohr Model Copper (atomic symbol: Cu, atomic number: 29) is a Block D, Group 11, Period 4 element with an atomic weight of 63.546. The number of electrons in each of copper's shells is 2, 8, 18, 1 and its electron configuration is [Ar]3d10 4s1. The copper atom has a radius of 128 pm and a Van der Waals radius of 186 pm. Copper was first discovered by Early Man prior to 9000 BC. In its elemental form, copper has a reddish-orange metallic and lustrous appearance. Of all pure metals, only silver Elemental Copperhas a higher electrical conductivity. The origin of the word copper comes from the Latin word 'cuprium' which translates as "metal of Cyprus," as the Mediterranean island of Cyprus was known as an ancient source of mined copper..

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