High-? Lanthanum Zirconium Oxide Thin Film Dielectrics from Aqueous Solution Precursors.

Title High-? Lanthanum Zirconium Oxide Thin Film Dielectrics from Aqueous Solution Precursors.
Authors K.N. Woods; T.H. Chiang; P.N. Plassmeyer; M.G. Kast; A.C. Lygo; A.K. Grealish; S.W. Boettcher; C.J. Page
Journal ACS Appl Mater Interfaces
DOI 10.1021/acsami.7b00915
Abstract

Metal oxide thin films are critical components in modern electronic applications. In particular, high-? dielectrics are of interest for reducing power consumption in metal-insulator-semiconductor (MIS) field-effect transistors. Although thin-film materials are typically produced via vacuum-based methods, solution deposition offers a scalable and cost-efficient alternative. We report an all-inorganic aqueous solution route to amorphous lanthanum zirconium oxide (La2Zr2O7, LZO) dielectric thin films. LZO films were spin-cast from aqueous solutions of metal nitrates and annealed at temperatures between 300 and 600 °C to produce dense, defect-free, and smooth films with subnanometer roughness. Dielectric constants of 12.2-16.4 and loss tangents <0.6% were obtained for MIS devices utilizing LZO as the dielectric layer (1 kHz). Leakage currents <10(-7) A cm(-2) at 4 MV cm(-1) were measured for samples annealed at 600 °C. The excellent surface morphology, high dielectric constants, and low leakage current densities makes these LZO dielectrics promising candidates for thin-film transistor devices.

Citation K.N. Woods; T.H. Chiang; P.N. Plassmeyer; M.G. Kast; A.C. Lygo; A.K. Grealish; S.W. Boettcher; C.J. Page.High-? Lanthanum Zirconium Oxide Thin Film Dielectrics from Aqueous Solution Precursors.. ACS Appl Mater Interfaces. 2017;9(12):1089710903. doi:10.1021/acsami.7b00915

Related Elements

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40 Zr 91.224000000 Zirconium

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Lanthanum

57 La 138.905470000 Lanthanum

See more Lanthanum products. Lanthanum (atomic symbol: La, atomic number: 57) is a Block F, Group 3, Period 6 element with an atomic weight of 138.90547. Lanthanum Bohr ModelThe number of electrons in each of lanthanum's shells is [2, 8, 18, 18, 9, 2] and its electron configuration is [Xe] 5d1 6s2. The lanthanum atom has a radius of 187 pm and a Van der Waals radius of 240 pm. Lanthanum was first discovered by Carl Mosander in 1838. In its elemental form, lanthanum has a silvery white appearance.Elemental Lanthanum It is a soft, malleable, and ductile metal that oxidizes easily in air. Lanthanum is the first element in the rare earth or lanthanide series. It is the model for all the other trivalent rare earths and it is the second most abundant of the rare earths after cerium. Lanthanum is found in minerals such as monazite and bastnasite. The name lanthanum originates from the Greek word Lanthaneia, which means 'to lie hidden'.

Related Forms & Applications

Oxides
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