Calcia Stabilized Zirconia Sputtering Target

CAS #:

Linear Formula:

ZrO2 • CaO

MDL Number:

N/A

EC No.:

234-373-8

ORDER

PRODUCT Product Code ORDER SAFETY DATA TECHNICAL DATA
(2N) 99% Calcia Stabilized Zirconia Sputtering Target
ZRO-CAO-02-ST
Pricing > SDS > Data Sheet >
(3N) 99.9% Calcia Stabilized Zirconia Sputtering Target
ZRO-CAO-03-ST
Pricing > SDS > Data Sheet >
(4N) 99.99% Calcia Stabilized Zirconia Sputtering Target
ZRO-CAO-04-ST
Pricing > SDS > Data Sheet >
(5N) 99.999% Calcia Stabilized Zirconia Sputtering Target
ZRO-CAO-05-ST
Pricing > SDS > Data Sheet >

Calcia Stabilized Zirconia Sputtering Target Properties (Theoretical)

Compound Formula CaZrO3
Molecular Weight 179.3
Appearance Gray-black solid
Melting Point ~2700 °C
Boiling Point ~5500 °C
Density 5.7 g/cm3
Solubility in H2O N/A
Exact Mass 177.852039
Monoisotopic Mass 177.852039

Calcia Stabilized Zirconia Sputtering Target Health & Safety Information

Signal Word N/A
Hazard Statements N/A
Hazard Codes N/A
Risk Codes N/A
Safety Statements N/A
Transport Information N/A

View and Print SDS

SAFETY DATA SHEET

Date Accessed: 12/20/2024
Date Revised:01/15/2022

SECTION 1. IDENTIFICATION

Product Name: Calcia Stabilized Zirconia Sputtering Target

Product Number: All applicable American Elements product codes, e.g. ZRO-CAO-02-ST , ZRO-CAO-03-ST , ZRO-CAO-04-ST , ZRO-CAO-05-ST

CAS #: 11129-15-0

Relevant identified uses of the substance: Scientific research and development

Supplier details:
American Elements
10884 Weyburn Ave.
Los Angeles, CA 90024
Tel: +1 310-208-0551
Fax: +1 310-208-0351

Emergency telephone number:
Domestic, North America: +1 800-424-9300
International: +1 703-527-3887


SECTION 2. HAZARDS IDENTIFICATION

Classification of the substance or mixture
Classification according to Regulation (EC) No 1272/2008
The product is not classified as hazardous to health or the environment according to the CLP regulation.
Classification according to Directive 67/548/EEC or Directive 1999/45/EC
N/A
Information concerning particular hazards for human and environment:
The product does not have to be labelled due to the calculation procedure of the "General Classification guideline for preparations of the EU" in the latest valid version.
Hazards not otherwise classified
No data available
Label elements
Labelling according to Regulation (EC) No 1272/2008
N/A
Hazard pictograms
N/A
Signal word
N/A
Hazard statements
N/A
WHMIS classification
Not controlled
Classification system
HMIS ratings (scale 0-4)
(Hazardous Materials Identification System)
HEALTH
FIRE
REACTIVITY
1


Health (acute effects) = 1
Flammability = 0
Physical Hazard = 0
Other hazards
Results of PBT and vPvB assessment
PBT:
N/A
vPvB:
N/A


SECTION 3. COMPOSITION/INFORMATION ON INGREDIENTS

Chemical characterization: Mixtures
Dangerous components:
1305-78-8 Calcium oxide
Xi R37/38-41
Eye Dam. 1, H318;
Skin Irrit. 2, H315; STOT SE 3, H335 4.0%
Additional information
None known.
Non-Hazardous Ingredients
1314-23-4 Zirconium(IV) oxide 96.0%


SECTION 4. FIRST AID MEASURES

Description of first aid measures
If inhaled:
Supply patient with fresh air. If not breathing, provide artificial respiration. Keep patient warm.
Seek immediate medical advice.
In case of skin contact:
Immediately wash with soap and water; rinse thoroughly.
Seek immediate medical advice.
In case of eye contact:
Rinse opened eye for several minutes under running water. Consult a physician.
If swallowed:
Seek medical treatment.
Information for doctor
Most important symptoms and effects, both acute and delayed
No data available
Indication of any immediate medical attention and special treatment needed
No data available


SECTION 5. FIREFIGHTING MEASURES

Extinguishing media
Suitable extinguishing agents
Product is not flammable. Use fire-fighting measures that suit the surrounding fire.
Special hazards arising from the substance or mixture
If this product is involved in a fire, the following can be released:
Calcium oxide
Zirconium oxide
Advice for firefighters
Protective equipment:
Wear self-contained respirator.
Wear fully protective impervious suit.


SECTION 6. ACCIDENTAL RELEASE MEASURES

Personal precautions, protective equipment and emergency procedures
Use personal protective equipment. Keep unprotected persons away.
Ensure adequate ventilation
Environmental precautions:
Do not allow product to enter drains, sewage systems, or other water courses.
Methods and materials for containment and cleanup:
Pick up mechanically.
Prevention of secondary hazards:
No special measures required.
Reference to other sections
See Section 7 for information on safe handling
See Section 8 for information on personal protection equipment.
See Section 13 for disposal information.


SECTION 7. HANDLING AND STORAGE

Handling
Precautions for safe handling
Keep container tightly sealed.
Store in cool, dry place in tightly closed containers.
Information about protection against explosions and fires:
The product is not flammable
Conditions for safe storage, including any incompatibilities
Storage
Requirements to be met by storerooms and receptacles:
No special requirements.
Information about storage in one common storage facility:
Do not store together with acids.
Store away from oxidizing agents.
Store away from halogens.
Store away from alcohols.
Further information about storage conditions:
Keep container tightly sealed.
Store in cool, dry conditions in well-sealed containers.
Specific end use(s)
No data available


SECTION 8. EXPOSURE CONTROLS/PERSONAL PROTECTION

Additional information about design of technical systems:
Properly operating chemical fume hood designed for hazardous chemicals and having an average face velocity of at least 100 feet per minute.
Control parameters
Components with limit values that require monitoring at the workplace:
1314-23-4 Zirconium(IV) oxide (96.0%)
PEL (USA) Long-term value: 5 mg/m3
as Zr
REL (USA) Short-term value: 10 mg/m3
Long-term value: 5 mg/m3
as Zr
TLV (USA) Short-term value: 10 mg/m3
Long-term value: 5 mg/m3
as Zr
EL (Canada) Short-term value: 10 mg/m3
Long-term value: 5 mg/m3
as Zr
1305-78-8 Calcium oxide (4.0%)
PEL (USA) Long-term value: 5 mg/m3
REL (USA) Long-term value: 2 mg/m3
TLV (USA) Long-term value: 2 mg/m3
EL (Canada) Long-term value: 2 mg/m3
EV (Canada) Long-term value: 2 mg/m3
Additional information:
No data
Exposure controls
Personal protective equipment
General protective and hygienic measures
The usual precautionary measures for handling chemicals should be followed.
Keep away from foodstuffs, beverages and feed.
Remove all soiled and contaminated clothing immediately.
Wash hands before breaks and at the end of work.
Maintain an ergonomically appropriate working environment.
Breathing equipment:
Use suitable respirator when high concentrations are present.
Recommended filter device for short term use:
Use a respirator with type N95 (USA) or PE (EN 143) cartridges as a backup to engineering controls. Risk assessment should be performed to determine if air-purifying respirators are appropriate. Only use equipment tested and approved under appropriate government standards.
Protection of hands:
Impervious gloves
Inspect gloves prior to use.
Suitability of gloves should be determined both by material and quality, the latter of which may vary by manufacturer.
Material of gloves
Nitrile rubber, NBR
Penetration time of glove material (in minutes)
480
Glove thickness
0.11 mm
Eye protection:
Safety glasses
Body protection:
Protective work clothing.


SECTION 9. PHYSICAL AND CHEMICAL PROPERTIES

Information on basic physical and chemical properties
General Information
Appearance:
Form: Powder
Color: White to pale yellow
Odor: Odorless
Odor threshold: No data available
pH: N/A
Change in condition
Melting point/Melting range: ca 2700 °C (ca 4892 °F) (ZrO₂)
Boiling point/Boiling range: No data available
Sublimation temperature / start: No data available
Flammability (solid, gas)
No data available.
Ignition temperature: No data available
Decomposition temperature: No data available
Autoignition: Product is not selfigniting.
Danger of explosion: No data available.
Explosion limits:
Lower: No data available
Upper: No data available
Vapor pressure: N/A
Density at 20 °C (68 °F): 5.89 g/cm3 (49.152 lbs/gal) (ZrO₂)
Relative density
No data available.
Vapor density
N/A
Evaporation rate
N/A
Solubility in Water (H2O): Insoluble
Partition coefficient (n-octanol/water): No data available.
Viscosity:
Dynamic: N/A
Kinematic: N/A
Solvent content:
Organic solvents: 0.0 %
Solids content: 100.0 %
Other information
No data available


SECTION 10. STABILITY AND REACTIVITY

Reactivity
No data available
Chemical stability
Stable under recommended storage conditions.
Thermal decomposition / conditions to be avoided:
Decomposition will not occur if used and stored according to specifications.
Possibility of hazardous reactions
Reacts with strong oxidizing agents
Conditions to avoid
No data available
Incompatible materials:
Acids
Oxidizing agents
Halogens
Alcohols
Hazardous decomposition products:
Calcium oxide
Zirconium oxide


SECTION 11. TOXICOLOGICAL INFORMATION

Information on toxicological effects
Acute toxicity:
The Registry of Toxic Effects of Chemical Substances (RTECS) contains acute toxicity data for components in this product.
LD/LC50 values that are relevant for classification:
No data
Skin irritation or corrosion:
May cause irritation
Eye irritation or corrosion:
May cause irritation
Sensitization:
No sensitizing effects known.
Germ cell mutagenicity:
No effects known.
Carcinogenicity:
ACGIH A4: Not classifiable as a human carcinogen: Inadequate data on which to classify the agent in terms of its carcinogenicity in humans and/or animals.
Reproductive toxicity:
No effects known.
Specific target organ system toxicity - repeated exposure:
No effects known.
Specific target organ system toxicity - single exposure:
No effects known.
Aspiration hazard:
No effects known.
Subacute to chronic toxicity:
No effects known.
Additional toxicological information:
To the best of our knowledge the acute and chronic toxicity of this substance is not fully known.
The product is not subject to classification according to internally approved calculation methods for preparations.
Carcinogenic categories
OSHA-Ca (Occupational Safety & Health Administration)
None of the ingredients is listed


SECTION 12. ECOLOGICAL INFORMATION

Toxicity
Aquatic toxicity:
No data available
Persistence and degradability
No data available
Bioaccumulative potential
No data available
Mobility in soil
No data available
Additional ecological information:
General notes:
Do not allow undiluted product or large quantities to reach groundwater, water courses, or sewage systems.
Avoid transfer into the environment.
Results of PBT and vPvB assessment
PBT:
N/A
vPvB:
N/A
Other adverse effects
No data available


SECTION 13. DISPOSAL CONSIDERATIONS

Waste treatment methods
Recommendation
Consult official regulations to ensure proper disposal.
Uncleaned packagings:
Recommendation:
Disposal must be made according to official regulations.


SECTION 14. TRANSPORT INFORMATION

UN-Number
DOT, ADN, IMDG, IATA
N/A
UN proper shipping name
DOT, ADN, IMDG, IATA
N/A
Transport hazard class(es)
DOT, ADR, ADN, IMDG, IATA
Class
N/A
Packing group
DOT, IMDG, IATA
N/A
Environmental hazards:
Marine pollutant (IMDG):
No
Special precautions for user
N/A
Transport in bulk according to Annex II of MARPOL73/78 and the IBC Code
N/A
Transport/Additional information:
DOT
Marine Pollutant (DOT):
No


SECTION 15. REGULATORY INFORMATION

Safety, health and environmental regulations/legislation specific for the substance or mixture
National regulations
All components of this product are listed in the U.S. Environmental Protection Agency Toxic Substances Control Act Chemical substance Inventory.
All components of this product are listed on the Canadian Domestic Substances List (DSL).
SARA Section 313 (specific toxic chemical listings)
None of the ingredients are listed.
California Proposition 65
Prop 65 - Chemicals known to cause cancer
None of the ingredients are listed.
Prop 65 - Developmental toxicity
None of the ingredients are listed.
Prop 65 - Developmental toxicity, female
None of the ingredients are listed.
Prop 65 - Developmental toxicity, male
None of the ingredients are listed.
Information about limitation of use:
For use only by technically qualified individuals.
Other regulations, limitations and prohibitive regulations
Substance of Very High Concern (SVHC) according to the REACH Regulations (EC) No. 1907/2006.
None of the ingredients are listed.
The conditions of restrictions according to Article 67 and Annex XVII of the Regulation (EC) No 1907/2006 (REACH) for the manufacturing, placing on the market and use must be observed.
None of the ingredients is listed.
Annex XIV of the REACH Regulations (requiring Authorisation for use)
None of the ingredients is listed.
Chemical safety assessment:
A Chemical Safety Assessment has not been carried out.


SECTION 16. OTHER INFORMATION

Safety Data Sheet according to Regulation (EC) No. 1907/2006 (REACH). The above information is believed to be correct but does not purport to be all inclusive and shall be used only as a guide. The information in this document is based on the present state of our knowledge and is applicable to the product with regard to appropriate safety precautions. It does not represent any guarantee of the properties of the product. American Elements shall not be held liable for any damage resulting from handling or from contact with the above product. See reverse side of invoice or packing slip for additional terms and conditions of sale. COPYRIGHT 1997-2022 AMERICAN ELEMENTS. LICENSED GRANTED TO MAKE UNLIMITED PAPER COPIES FOR INTERNAL USE ONLY.

About Calcia Stabilized Zirconia Sputtering Target

American Elements specializes in producing high purity Calcia Stabilized Zirconia Sputtering Targets with the highest possible density High Purity (99.99%) Calcia Stabilized Zirconia Sputtering Targetand smallest possible average grain sizes for use in semiconductor, chemical vapor deposition (CVD) and physical vapor deposition (PVD) display and optical applications. Our standard sputtering targets for thin film deposition are available monoblock or bonded with planar target dimensions and configurations up to 820 mm with hole drill locations and threading, beveling, grooves and backing designed to work with both older sputtering devices as well as the latest process equipment, such as large area coating for solar energy or fuel cells and flip-chip applications. Rotary (cylindrical), round, rectangular, square, ring, annular, oval, "dog-bone" and other shaped targets are available in standard, custom, and research sized dimensions. All targets are analyzed using best demonstrated techniques including X-Ray Fluorescence (XRF), Glow Discharge Mass Spectrometry (GDMS), and Inductively Coupled Plasma (ICP). Materials are produced using crystallization, solid state and other ultra high purification processes such as sublimation. American Elements specializes in producing custom compositions for commercial and research applications and for new proprietary technologies. Please request a quote above for more information on lead time and pricing.

Calcia Stabilized Zirconia Sputtering Target Synonyms

Zirconium oxide calcia stabilized; calcined zirconia; Calcium dioxido(oxo)zirconium; calcium zirconium trioxide; Calcium trioxozirconate(2-); Calcium zirconate; calcia stabilized zirconium oxide; zirconium oxide calcia stabilized wear parts; CZO; ZCO

Chemical Identifiers

Linear Formula ZrO2 • CaO
MDL Number N/A
EC No. 234-373-8
Beilstein/Reaxys No. N/A
Pubchem CID 19827517
IUPAC Name calcium; oxygen(2-); zirconium(4+)
SMILES [O-2].[O-2].[O-2].[Ca+2].[Zr+4]
InchI Identifier InChI=1S/Ca.3O.Zr/q+2;3*-2;+4
InchI Key OWDMWYGPNPPHFN-UHFFFAOYSA-N

Packaging Specifications

Typical bulk packaging includes palletized plastic 5 gallon/25 kg. pails, fiber and steel drums to 1 ton super sacks in full container (FCL) or truck load (T/L) quantities. Research and sample quantities and hygroscopic, oxidizing or other air sensitive materials may be packaged under argon or vacuum. Shipping documentation includes a Certificate of Analysis and Safety Data Sheet (SDS). Solutions are packaged in polypropylene, plastic or glass jars up to palletized 440 gallon liquid totes, and 36,000 lb. tanker trucks.

Payment Methods

American Elements accepts checks, wire transfers, ACH, most major credit and debit cards (Visa, MasterCard, AMEX, Discover) and Paypal.

For the convenience of our international customers, American Elements offers the following additional payment methods:

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Related Elements

Calcium

See more Calcium products. Calcium (atomic symbol: Ca, atomic number: 20) is a Block S, Group 2, Period 4 element with an atomic weight of 40.078. The number of electrons in each of Calcium's shells is [2, 8, 8, 2] and its electron configuration is [Ar]4s2. Calcium Bohr ModelThe calcium atom has a radius of 197 pm and a Van der Waals radius of 231 pm. Calcium was discovered and first isolated by Sir Humphrey Davy in 1808. It is the fifth most abundant element in the earth's crust and can be found in minerals such as dolomite, gypsum, plagioclases, amphiboles, pyroxenes and garnets. In its elemental form, calcium has a dull gray-silver appearance. Calcium is a reactive, soft metal that is a member of the alkaline earth elements. Elemental CalciumIt frequently serves as an alloying agent for other metals like aluminum and beryllium, and industrial materials like cement and mortar are composed of calcium compounds like calcium carbonate. It is also an biologically essential substance found in teeth, bones, and shells. The name "calcium" originates from the Latin word "calics," meaning lime.

Zirconium

See more Zirconium products. Zirconium (atomic symbol: Zr, atomic number: 40) is a Block D, Group 4, Period 5 element with an atomic weight of 91.224. Zirconium Bohr ModelThe number of electrons in each of Zirconium's shells is 2, 8, 18, 10, 2 and its electron configuration is [Kr]4d2 5s2. The zirconium atom has a radius of 160 pm and a Van der Waals radius of 186 pm. Zirconium was discovered by Martin Heinrich Klaproth in 1789 and first isolated by Jöns Jakob Berzelius in 1824. In its elemental form, zirconium has a silvery white appearance that is similar to titanium. Zirconium's principal mineral is zircon (zirconium silicate). Elemental ZirconiumZirconium is commercially produced as a byproduct of titanium and tin mining and has many applications as a opacifier and a refractory material. It is not found in nature as a free element. The name of zirconium comes from the mineral zircon, the most important source of zirconium, and from the Persian wordzargun, meaning gold-like.

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