Zirconium Carbide Sputtering Target

CAS #:

Linear Formula:

ZrC

MDL Number:

MFCD00049640

EC No.:

235-125-1

ORDER

PRODUCT Product Code ORDER SAFETY DATA TECHNICAL DATA
(2N) 99% Zirconium Carbide
ZR-C-02
Pricing > SDS > Data Sheet >
(2N5) 99.5% Zirconium Carbide
ZR-C-025
Pricing > SDS > Data Sheet >
(3N) 99.9% Zirconium Carbide
ZR-C-03
Pricing > SDS > Data Sheet >
(3N5) 99.95% Zirconium Carbide
ZR-C-035
Pricing > SDS > Data Sheet >
(4N) 99.99% Zirconium Carbide
ZR-C-04
Pricing > SDS > Data Sheet >
(5N) 99.999% Zirconium Carbide
ZR-C-05
Pricing > SDS > Data Sheet >

Zirconium Carbide Sputtering Target Properties (Theoretical)

Compound Formula ZrC
Molecular Weight 103.23
Appearance gray
Melting Point 3,532° C (6,390° F)
Boiling Point 5,100° C (9,212° F)
Density 6.73g/cm3
Solubility in H2O N/A
Exact Mass 102.912529
Monoisotopic Mass 102.912529
Charge N/A

Zirconium Carbide Sputtering Target Health & Safety Information

Signal Word Danger
Hazard Statements H228-H302-H312-H332
Hazard Codes F, Xn
Risk Codes 11-20/21/22
Safety Statements 16-27-33-36/37/39
RTECS Number N/A
Transport Information UN 3178 4.1/PG 2
WGK Germany 3

View and Print SDS

SAFETY DATA SHEET

Date Accessed: 12/26/2024
Date Revised:01/15/2022

SECTION 1. IDENTIFICATION

Product Name: Zirconium Carbide Sputtering Target

Product Number: All applicable American Elements product codes, e.g. ZR-C-02 , ZR-C-025 , ZR-C-03 , ZR-C-035 , ZR-C-04 , ZR-C-05

CAS #: 12070-14-3

Relevant identified uses of the substance: Scientific research and development

Supplier details:
American Elements
10884 Weyburn Ave.
Los Angeles, CA 90024
Tel: +1 310-208-0551
Fax: +1 310-208-0351

Emergency telephone number:
Domestic, North America: +1 800-424-9300
International: +1 703-527-3887


SECTION 2. HAZARDS IDENTIFICATION

Accute Health Effects: Irritating to the skin and eyes on contact. Inhalation will cause irritation to the lungs and mucus membrane. Irritation to the eyes will cause watering and redness. Reddening, scaling, and itching are characteristics of skin inflammation. Follow safe industrial hygiene practices and always wear protective equipment when handling this compound.
Chronic Health Effects: This product has no known chronic effects. Repeated or prolong exposure to this compound is not known to aggravate medical conditions.
Accute Health Effects:&nbspThis product is not listed by NTP, IARC or regulated as a Carcinogen by OSHA.


SECTION 3. COMPOSITION/INFORMATION ON INGREDIENTS

Substances
(CAS#) Description:
Zirconium carbide (CAS# 12070-14-3): 100%
Identification number(s):
EINECS Number: 235-125-1
Additional information:
Zirconium is routinely found with a low level of hafnium since separation of the two elements is difficult.


SECTION 4. FIRST AID MEASURES

Description of first aid measures
If inhaled:
Supply patient with fresh air. If not breathing, provide artificial respiration. Keep patient warm.
Seek immediate medical advice.
In case of skin contact:
Immediately wash with soap and water; rinse thoroughly.
Seek immediate medical advice.
In case of eye contact:
Rinse opened eye for several minutes under running water. Consult a physician.
If swallowed:
Seek immediate medical advice.


SECTION 5. FIREFIGHTING MEASURES

Extinguishing media
Suitable extinguishing agents
In case of fire, use sand, carbon dioxide or powdered extinguishing agent. Never use water.
For safety reasons unsuitable extinguishing agents Water
Special hazards arising from the substance or mixture
In case of fire, the following can be released:
Metal oxide fume
Carbon monoxide and carbon dioxide
Advice for firefighters
Protective equipment:
Wear self-contained respirator.
Wear fully protective impervious suit.


SECTION 6. ACCIDENTAL RELEASE MEASURES

Personal precautions, protective equipment and emergency procedures
Use personal protective equipment. Keep unprotected persons away.
Ensure adequate ventilation
Keep away from ignition sources
Environmental precautions:
Do not allow material to be released to the environment without official permits.
Methods and materials for containment and cleanup:
Ensure adequate ventilation.
Do not flush with water or aqueous cleansing agents
Keep away from ignition sources.
Reference to other sections
See Section 7 for information on safe handling
See Section 8 for information on personal protection equipment.
See Section 13 for disposal information.


SECTION 7. HANDLING AND STORAGE

Handling
Precautions for safe handling
Handle under dry protective gas.
Keep container tightly sealed.
Store in cool, dry place in tightly closed containers.
Ensure good ventilation at the workplace.
Information about protection against explosions and fires:
Keep ignition sources away.
Protect against electrostatic charges.
Fumes can combine with air to form an explosive mixture.
Conditions for safe storage, including any incompatibilities
Requirements to be met by storerooms and receptacles: Store in a cool location.
Information about storage in one common storage facility:
Store away from air.
Store away from oxidizing agents.
Further information about storage conditions:
Store under dry inert gas.
Keep container tightly sealed.
Store in cool, dry conditions in well-sealed containers.
This product is air sensitive.


SECTION 8. EXPOSURE CONTROLS/PERSONAL PROTECTION

Additional information about design of technical systems:
Properly operating chemical fume hood designed for hazardous chemicals and having an average face velocity of at least 100 feet per minute.
Control parameters
Components with limit values that require monitoring at the workplace:
Zirconium and compounds, as Zr
mg/m3
ACGIH TLV 5; 10-STEL
Austria MAK 5
Denmark TWA 5
Finland TWA 5
Hungary 5-STEL
Korea TLV 5
Poland TWA 5; 10-STEL
Russia 5-STEL
OSHA PEL 5
Additional information: No data
Exposure controls
Personal protective equipment
Follow typical protective and hygienic practices for handling chemicals.
Keep away from foodstuffs, beverages and feed.
Remove all soiled and contaminated clothing immediately.
Wash hands before breaks and at the end of work.
Breathing equipment: Use suitable respirator when high concentrations are present.
Protection of hands:
Impervious gloves
Inspect gloves prior to use.
Material of gloves
The selection of suitable gloves not only depends on the material, but also on quality.
Quality will vary from manufacturer to manufacturer.
Eye protection: Safety glasses
Body protection: Protective work clothing.


SECTION 9. PHYSICAL AND CHEMICAL PROPERTIES

Information on basic physical and chemical properties
Appearance:
Form: Solid in various forms
Color: Grey
Odor: Odorless
Odor threshold: No data available.
pH: N/A
Melting point/Melting range: 3540°C (6404 °F)
Boiling point/Boiling range: No data available
Sublimation temperature / start: No data available
Flash point: N/A
Flammability (solid, gas) Highly flammable.
Ignition temperature: No data available
Decomposition temperature: No data available
Autoignition: No data available.
Explosion limits:
Lower: No data available
Upper: No data available
Vapor pressure: N/A
Density at 20°C (68 °F): 6.73 g/cm3 (56.162 lbs/gal)
Relative density No data available.
Vapor density N/A
Evaporation rate N/A
Solubility in / Miscibility with
Water: Insoluble
Segregation coefficient (n-octonol/water): No data available.
Viscosity:
Dynamic: N/A
Kinematic: N/A
Other information No data available


SECTION 10. STABILITY AND REACTIVITY

Reactivity
Chemical stability
Thermal decomposition / conditions to be avoided:
Decomposition will not occur if used and stored according to specifications.
Possibility of hazardous reactions No dangerous reactions known
Incompatible materials:
Air
Oxidizing agents
Hazardous decomposition products:
Metal oxide fume
Carbon monoxide and carbon dioxide


SECTION 11. TOXICOLOGICAL INFORMATION

Information on toxicological effects
Acute toxicity:
The Registry of Toxic Effects of Chemical Substances (RTECS) contains acute toxicity data for this substance.
LD/LC50 values that are relevant for classification: No data
Skin irritation or corrosion: May cause irritation
Eye irritation or corrosion: May cause irritation
Sensitization: No sensitizing effects known.
Germ cell mutagenicity: No effects known.
Carcinogenicity:
ACGIH A4: Not classifiable as a human carcinogen: Inadequate data on which to classify the agent in terms of its carcinogenicity in humans and/or animals.
Reproductive toxicity: No effects known.
Specific target organ system toxicity - repeated exposure: No effects known.
Specific target organ system toxicity - single exposure: No effects known.
Aspiration hazard: No effects known.
Subacute to chronic toxicity: No effects known.
Additional toxicological information:
To the best of our knowledge the acute and chronic toxicity of this substance is not fully known.


SECTION 12. ECOLOGICAL INFORMATION

Toxicity
Acquatic toxicity: No data available
Persistence and degradability No data available
Behavior in environmental systems:
Bioaccumulative potential No data available
Mobility in soil No data available
Additional ecological information:
Do not allow material to be released to the environment without official permits.
Results of PBT and vPvB assessment
PBT: N/A
vPvB: N/A
Other adverse effects No data available


SECTION 13. DISPOSAL CONSIDERATIONS

Waste treatment methods
Recommendation
Consult official regulations to ensure proper disposal.
Uncleaned packagings:
Recommendation:
Disposal must be made according to official regulations.


SECTION 14. TRANSPORT INFORMATION

DOT
Proper Shipping Name: None
Non-Hazardous for Transport: This substance is considered to be non-hazardous for transport.
IATA
Non-Hazardous for Air Transport: Non-hazardous for air transport.


SECTION 15. REGULATORY INFORMATION

Safety, health and environmental regulations/legislation specific for the substance or mixture
Product related hazard informations:
Hazard symbols:
F Highly flammable
Risk phrases:
11 Highly flammable.
Safety phrases:
7 Keep container tightly closed.
33 Take precautionary measures against static discharges.
43 In case of fire, use sand, carbon dioxide or powdered extinguishing agent. Never use water.
60 This material and its container must be disposed of as hazardous waste.
National regulations
All components of this product are listed in the U.S. Environmental Protection Agency Toxic
Substances Control Act Chemical substance Inventory.
Information about limitation of use: For use only by technically qualified individuals.
Chemical safety assessment: A Chemical Safety Assessment has not been carried out.


SECTION 16. OTHER INFORMATION

Safety Data Sheet according to Regulation (EC) No. 1907/2006 (REACH). The above information is believed to be correct but does not purport to be all inclusive and shall be used only as a guide. The information in this document is based on the present state of our knowledge and is applicable to the product with regard to appropriate safety precautions. It does not represent any guarantee of the properties of the product. American Elements shall not be held liable for any damage resulting from handling or from contact with the above product. See reverse side of invoice or packing slip for additional terms and conditions of sale. COPYRIGHT 1997-2022 AMERICAN ELEMENTS. LICENSED GRANTED TO MAKE UNLIMITED PAPER COPIES FOR INTERNAL USE ONLY.

About Zirconium Carbide Sputtering Target

American Elements specializes in producing high purity Zirconium Carbide Sputtering Targets with the highest possible density and smallest possible average grain sizes for use in semiconductor, chemical vapor deposition (CVD) and physical vapor deposition (PVD) display and optical applications. Our standard Sputtering Targets for thin film are available monoblock or bonded with planar target dimensions and configurations up to 820 mm with hole drill locations and threading, beveling, grooves and backing designed to work with both older sputtering devises as well as the latest process equipment, such as large area coating for solar energy or fuel cells and flip-chip applications. Research sized targets are also produced as well as custom sizes and alloys. All targets are analyzed using best demonstrated techniques including X-Ray Fluorescence (XRF), Glow Discharge Mass Spectrometry (GDMS), and Inductively Coupled Plasma (ICP). "Sputtering" allows for thin film deposition of an ultra high purity sputtering metallic or oxide material onto another solid substrate by the controlled removal and conversion of the target material into a directed gaseous/plasma phase through ionic bombardment. We can also provide targets outside this range in addition to just about any size rectangular, annular, or oval target. Materials are produced using crystallization, solid state and other ultra high purification processes such as sublimation. American Elements specializes in producing custom compositions for commercial and research applications and for new proprietary technologies. Typical and custom packaging is available. Other shapes are available by request.

Zirconium Carbide Sputtering Target Synonyms

methylidynezirconium, Zirconium(IV) carbide

Chemical Identifiers

Linear Formula ZrC
MDL Number MFCD00049640
EC No. 235-125-1
Beilstein/Reaxys No. N/A
Pubchem CID N/A
IUPAC Name N/A
SMILES [Zr].C
InchI Identifier InChI=1S/CH4.Zr/h1H4;
InchI Key UGHSGZIDZZRZKT-UHFFFAOYSA-N

Packaging Specifications

Typical bulk packaging includes palletized plastic 5 gallon/25 kg. pails, fiber and steel drums to 1 ton super sacks in full container (FCL) or truck load (T/L) quantities. Research and sample quantities and hygroscopic, oxidizing or other air sensitive materials may be packaged under argon or vacuum. Shipping documentation includes a Certificate of Analysis and Safety Data Sheet (SDS). Solutions are packaged in polypropylene, plastic or glass jars up to palletized 440 gallon liquid totes, and 36,000 lb. tanker trucks.

Payment Methods

American Elements accepts checks, wire transfers, ACH, most major credit and debit cards (Visa, MasterCard, AMEX, Discover) and Paypal.

For the convenience of our international customers, American Elements offers the following additional payment methods:

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Related Elements

Zirconium

See more Zirconium products. Zirconium (atomic symbol: Zr, atomic number: 40) is a Block D, Group 4, Period 5 element with an atomic weight of 91.224. Zirconium Bohr ModelThe number of electrons in each of Zirconium's shells is 2, 8, 18, 10, 2 and its electron configuration is [Kr]4d2 5s2. The zirconium atom has a radius of 160 pm and a Van der Waals radius of 186 pm. Zirconium was discovered by Martin Heinrich Klaproth in 1789 and first isolated by Jöns Jakob Berzelius in 1824. In its elemental form, zirconium has a silvery white appearance that is similar to titanium. Zirconium's principal mineral is zircon (zirconium silicate). Elemental ZirconiumZirconium is commercially produced as a byproduct of titanium and tin mining and has many applications as a opacifier and a refractory material. It is not found in nature as a free element. The name of zirconium comes from the mineral zircon, the most important source of zirconium, and from the Persian wordzargun, meaning gold-like.

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