Fused Quartz Sputtering Target

CAS #:

Linear Formula:

SiO2

MDL Number:

MFCD00011232

EC No.:

238-878-4

ORDER

PRODUCT Product Code ORDER SAFETY DATA TECHNICAL DATA
(2N) 99% Fused Quartz Sputtering Target
SIO-QTZ-02-ST
Pricing > SDS > Data Sheet >
(3N) 99.9% Fused Quartz Sputtering Target
SIO-QTZ-03-ST
Pricing > SDS > Data Sheet >
(4N) 99.99% Fused Quartz Sputtering Target
SIO-QTZ-04-ST
Pricing > SDS > Data Sheet >
(5N) 99.999% Fused Quartz Sputtering Target
SIO-QTZ-05-ST
Pricing > SDS > Data Sheet >

Fused Quartz Sputtering Target Properties (Theoretical)

Compound Formula O2Si
Molecular Weight 60.08
Appearance White to gray target
Melting Point 1660-1710 °C
Boiling Point 4046 °C
Density 2.2 g/cm-3
Solubility in H2O N/A
Refractive Index 1.5
Electrical Resistivity 0.7 x 109 Ω-cm (350 °C)
Poisson's Ratio 0.17
Specific Heat 720 J/kg-K
Tensile Strength 50 MPa (Ultimate)
Thermal Expansion 0.5 µm/m-K
Young's Modulus 73 GPa
Exact Mass 59.966756
Monoisotopic Mass 59.966756

Fused Quartz Sputtering Target Health & Safety Information

Signal Word Danger
Hazard Statements H350-H373
Hazard Codes Xn
Precautionary Statements P260-P281-P308+P313-P314-P405-P501
Risk Codes N/A
Safety Statements N/A
RTECS Number VV7330000
Transport Information NONH for all modes of transport
GHS Pictograms

View and Print SDS

SAFETY DATA SHEET

Date Accessed: 11/25/2024
Date Revised:01/15/2022

SECTION 1. IDENTIFICATION

Product Name: Fused Quartz Sputtering Target

Product Number: All applicable American Elements product codes, e.g. SIO-QTZ-02-ST , SIO-QTZ-03-ST , SIO-QTZ-04-ST , SIO-QTZ-05-ST

CAS #: 14808-60-7

Relevant identified uses of the substance: Scientific research and development

Supplier details:
American Elements
10884 Weyburn Ave.
Los Angeles, CA 90024
Tel: +1 310-208-0551
Fax: +1 310-208-0351

Emergency telephone number:
Domestic, North America: +1 800-424-9300
International: +1 703-527-3887


SECTION 2. HAZARDS IDENTIFICATION

Classification of the substance or mixture
Classification according to Regulation (EC) No 1272/2008
GHS08 Health hazard
Carc. 1B H350 May cause cancer.
STOT RE 2 H373 May cause damage to the lung, the spleen, the blood and the endocrine system through prolonged or repeated exposure. Route of exposure:
Inhalative.
Classification according to Directive 67/548/EEC or Directive 1999/45/EC
T; Toxic
R49: May cause cancer by inhalation.
Xn; Harmful
R48/20: Harmful: danger of serious damage to health by prolonged exposure through inhalation.
Information concerning particular hazards for human and environment:
N/A
Hazards not otherwise classified
No data available
Label elements
Labelling according to Regulation (EC) No 1272/2008
The substance is classified and labeled according to the CLP regulation.
Hazard pictograms

Health Hazard - GHS08

GHS08
Signal word
Danger
Hazard statements
H350 May cause cancer.
H373 May cause damage to the lung, the spleen, the blood and the endocrine system through prolonged or repeated exposure. Route of exposure: Inhalative.
Precautionary statements
P260 Do not breathe dust/fume/gas/mist/vapors/spray.
P281 Use personal protective equipment as required.
P308+P313 IF exposed or concerned: Get medical advice/attention.
P314 Get medical advice/attention if you feel unwell.
P405 Store locked up.
P501 Dispose of contents/container in accordance with local/regional/national/international regulations.
WHMIS classification
D2A - Very toxic material causing other toxic effects
Classification system
HMIS ratings (scale 0-4)
(Hazardous Materials Identification System)
Health (acute effects) = 1
Flammability = 0
Physical Hazard = 0
Other hazards
Results of PBT and vPvB assessment
PBT:
N/A
vPvB:
N/A


SECTION 3. COMPOSITION/INFORMATION ON INGREDIENTS

Substances
CAS No. / Substance Name:
14808-60-7 Silicon(IV) oxide
Identification number(s):
EC number:
238-878-4


SECTION 4. FIRST AID MEASURES

Description of first aid measures
If inhaled:
Supply patient with fresh air. If not breathing, provide artificial respiration. Keep patient warm.
Seek immediate medical advice.
In case of skin contact:
Immediately wash with soap and water; rinse thoroughly.
Seek immediate medical advice.
In case of eye contact:
Rinse opened eye for several minutes under running water. Consult a physician.
If swallowed:
Seek medical treatment.
Information for doctor
Most important symptoms and effects, both acute and delayed
No data available
Indication of any immediate medical attention and special treatment needed
No data available


SECTION 5. FIREFIGHTING MEASURES

Extinguishing media
Suitable extinguishing agents
Product is not flammable. Use fire-fighting measures that suit the surrounding fire.
Special hazards arising from the substance or mixture
If this product is involved in a fire, the following can be released:
Silicon oxide
Advice for firefighters
Protective equipment:
Wear self-contained respirator.
Wear fully protective impervious suit.


SECTION 6. ACCIDENTAL RELEASE MEASURES

Personal precautions, protective equipment and emergency procedures
Use personal protective equipment. Keep unprotected persons away.
Ensure adequate ventilation
Environmental precautions:
Do not allow material to be released to the environment without official permits.
Do not allow product to enter drains, sewage systems, or other water courses.
Do not allow material to penetrate the ground or soil.
Methods and materials for containment and cleanup:
Dispose of contaminated material as waste according to section 13.
Ensure adequate ventilation.
Prevention of secondary hazards:
No special measures required.
Reference to other sections
See Section 7 for information on safe handling
See Section 8 for information on personal protection equipment.
See Section 13 for disposal information.


SECTION 7. HANDLING AND STORAGE

Handling
Precautions for safe handling
Keep container tightly sealed.
Store in cool, dry place in tightly closed containers.
Ensure good ventilation at the workplace.
Open and handle container with care.
Information about protection against explosions and fires:
The product is not flammable
Conditions for safe storage, including any incompatibilities
Requirements to be met by storerooms and receptacles:
No special requirements.
Information about storage in one common storage facility:
No data available
Further information about storage conditions:
Keep container tightly sealed.
Store in cool, dry conditions in well-sealed containers.
Specific end use(s)
No data available


SECTION 8. EXPOSURE CONTROLS/PERSONAL PROTECTION

Additional information about design of technical systems:
Properly operating chemical fume hood designed for hazardous chemicals and having an average face velocity of at least 100 feet per minute.
Control parameters
Components with limit values that require monitoring at the workplace:
14808-60-7 Silicon(IV) oxide (100.0%)
PEL (USA) see Quartz listing
REL (USA) Long-term value: 0.05* mg/m3
*respirable dust; See Pocket Guide App. A
TLV (USA) Long-term value: 0.025* mg/m3
*as respirable fraction
EL (Canada) Long-term value: 0.025 mg/m3
ACGIH A2; IARC 1
EV (Canada) Long-term value: 0.10* mg/m3
*respirable fraction
Additional information:
No data
Exposure controls
Personal protective equipment
Follow typical protective and hygienic practices for handling chemicals.
Keep away from foodstuffs, beverages and feed.
Remove all soiled and contaminated clothing immediately.
Wash hands before breaks and at the end of work.
Store protective clothing separately.
Maintain an ergonomically appropriate working environment.
Breathing equipment:
Use suitable respirator when high concentrations are present.
Recommended filter device for short term use:
Use a respirator with type P100 (USA) or P3 (EN 143) cartridges as a backup to engineering controls. Risk assessment should be performed to determine if air-purifying respirators are appropriate. Only use equipment tested and approved under appropriate government standards.
Protection of hands:
Impervious gloves
Inspect gloves prior to use.
Suitability of gloves should be determined both by material and quality, the latter of which may vary by manufacturer.
Material of gloves
Nitrile rubber, NBR
Penetration time of glove material (in minutes)
No data available
Eye protection:
Safety glasses
Body protection:
Protective work clothing


SECTION 9. PHYSICAL AND CHEMICAL PROPERTIES

Information on basic physical and chemical properties
Appearance:
Form: Powder or Solid
Color: Colorless
Odor: Odorless
Odor threshold: No data available.
pH: N/A
Melting point/Melting range: 1710 °C (3110 °F)
Boiling point/Boiling range: 2230 °C (4046 °F)
Sublimation temperature / start: No data available
Flammability (solid, gas)
No data available.
Ignition temperature: No data available
Decomposition temperature: No data available
Autoignition: No data available.
Danger of explosion: No data available.
Explosion limits:
Lower: No data available
Upper: No data available
Vapor pressure: N/A
Density: No data available
Relative density
No data available.
Vapor density
N/A
Evaporation rate
N/A
Solubility in Water (H2O): Insoluble
Partition coefficient (n-octanol/water): No data available.
Viscosity:
Dynamic: N/A
Kinematic: N/A
Other information
No data available


SECTION 10. STABILITY AND REACTIVITY

Reactivity
No data available
Chemical stability
Stable under recommended storage conditions.
Thermal decomposition / conditions to be avoided:
Decomposition will not occur if used and stored according to specifications.
Possibility of hazardous reactions
No dangerous reactions known
Conditions to avoid
No data available
Incompatible materials:
No data available
Hazardous decomposition products:
Silicon oxide


SECTION 11. TOXICOLOGICAL INFORMATION

Information on toxicological effects
Acute toxicity:
The Registry of Toxic Effects of Chemical Substances (RTECS) contains acute toxicity data for this substance.
LD/LC50 values that are relevant for classification:
No data
Skin irritation or corrosion:
May cause irritation
Eye irritation or corrosion:
May cause irritation
Sensitization:
No sensitizing effects known.
Germ cell mutagenicity:
The Registry of Toxic Effects of Chemical Substances (RTECS) contains mutation data for this substance.
Carcinogenicity:
May cause cancer.
IARC-1: Carcinogenic to humans: sufficient evidence of carcinogenicity.
ACGIH A2: Suspected human carcinogen: Agent is carcinogenic in experimental animals at dose levels, by route(s) of administration, at site(s), of histologic type(s),or by mechanism(s) considered relevant to worker exposure. Available epidemiologic studies are conflicting or insufficient to
confirm an increased risk of cancer in exposed humans.
NTP-K: Known to be carcinogenic: sufficient evidence from human studies.
The Registry of Toxic Effects of Chemical Substances (RTECS) contains tumorigenic and/or carcinogenic and/or neoplastic data for this substance.
Reproductive toxicity:
No effects known.
Specific target organ system toxicity - repeated exposure:
May cause damage to the lung, the spleen, the blood and the endocrine system through prolonged or repeated exposure. Route of exposure: Inhalative.
Specific target organ system toxicity - single exposure:
No effects known.
Aspiration hazard:
No effects known.
Subacute to chronic toxicity:
The Registry of Toxic Effects of Chemical Substances (RTECS) contains multiple dose toxicity data for this substance.
Additional toxicological information:
To the best of our knowledge the acute and chronic toxicity of this substance is not fully known.


SECTION 12. ECOLOGICAL INFORMATION

Toxicity
Aquatic toxicity:
No data available
Persistence and degradability
No data available
Bioaccumulative potential
No data available
Mobility in soil
No data available
Additional ecological information:
Do not allow material to be released to the environment without official permits.
Avoid transfer into the environment.
Results of PBT and vPvB assessment
PBT:
N/A
vPvB:
N/A
Other adverse effects
No data available


SECTION 13. DISPOSAL CONSIDERATIONS

Waste treatment methods
Recommendation
Consult official regulations to ensure proper disposal.
Uncleaned packagings:
Recommendation:
Disposal must be made according to official regulations.


SECTION 14. TRANSPORT INFORMATION

UN-Number
DOT, ADN, IMDG, IATA
N/A
UN proper shipping name
DOT, ADN, IMDG, IATA
N/A
Transport hazard class(es)
DOT, ADR, ADN, IMDG, IATA
Class
N/A
Packing group
DOT, IMDG, IATA
N/A
Environmental hazards:
N/A
Special precautions for user
N/A
Transport in bulk according to Annex II of MARPOL73/78 and the IBC Code
N/A
Transport/Additional information:
DOT
Marine Pollutant (DOT):
No


SECTION 15. REGULATORY INFORMATION

Safety, health and environmental regulations/legislation specific for the substance or mixture
National regulations
All components of this product are listed in the U.S. Environmental Protection Agency Toxic Substances Control Act Chemical substance Inventory.
All components of this product are listed on the Canadian Domestic Substances List (DSL).
SARA Section 313 (specific toxic chemical listings)
Substance is not listed.
California Proposition 65
Prop 65 - Chemicals known to cause cancer
14808-60-7 Silicon(IV) oxide
Prop 65 - Developmental toxicity
Substance is not listed.
Prop 65 - Developmental toxicity, female
Substance is not listed.
Prop 65 - Developmental toxicity, male
Substance is not listed.
Information about limitation of use:
For use only by technically qualified individuals.
Other regulations, limitations and prohibitive regulations
Substance of Very High Concern (SVHC) according to the REACH Regulations (EC) No. 1907/2006.
Substance is not listed.
The conditions of restrictions according to Article 67 and Annex XVII of the Regulation (EC) No 1907/2006 (REACH) for the manufacturing, placing on themarket and use must be observed.
Substance is not listed.
Annex XIV of the REACH Regulations (requiring Authorisation for use)
Substance is not listed.
REACH - Pre-registered substances
Substance is listed.
Chemical safety assessment:
A Chemical Safety Assessment has not been carried out.


SECTION 16. OTHER INFORMATION

Safety Data Sheet according to Regulation (EC) No. 1907/2006 (REACH). The above information is believed to be correct but does not purport to be all inclusive and shall be used only as a guide. The information in this document is based on the present state of our knowledge and is applicable to the product with regard to appropriate safety precautions. It does not represent any guarantee of the properties of the product. American Elements shall not be held liable for any damage resulting from handling or from contact with the above product. See reverse side of invoice or packing slip for additional terms and conditions of sale. COPYRIGHT 1997-2022 AMERICAN ELEMENTS. LICENSED GRANTED TO MAKE UNLIMITED PAPER COPIES FOR INTERNAL USE ONLY.

About Fused Quartz Sputtering Target

High Purity (99.99%) Quartz Sputtering TargetAmerican Elements specializes in producing high purity Fused Quartz Sputtering Targets with the highest possible density and smallest possible average grain sizes for use in semiconductor, chemical vapor deposition (CVD) and physical vapor deposition (PVD) display and optical applications. Our standard Sputtering Targets for thin film are available monoblock or bonded with planar target dimensions and configurations up to 820 mm with hole drill locations and threading, beveling, grooves and backing designed to work with both older sputtering devices as well as the latest process equipment, such as large area coating for solar energy or fuel cells and flip-chip applications. We offer all shapes and configurations of targets compatible with all standard guns including circular, rectangular, annular, oval, "dog-bone," rotatable (rotary), multi-tiled and others in standard, custom, and research sized dimensions. All targets are analyzed using best demonstrated techniques including X-Ray Fluorescence (XRF), Glow Discharge Mass Spectrometry (GDMS), and Inductively Coupled Plasma (ICP). "Sputtering" allows for thin film deposition of an ultra high purity sputtering metallic or oxide material onto another solid substrate by the controlled removal and conversion of the target material into a directed gaseous/plasma phase through ionic bombardment. Materials are produced using crystallization, solid state and other ultra high purification processes such as sublimation. American Elements specializes in producing custom compositions for commercial and research applications and for new proprietary technologies. Please contact us for information on lead time and pricing above.

Fused Quartz Sputtering Target Synonyms

N/A

Chemical Identifiers

Linear Formula SiO2
MDL Number MFCD00011232
EC No. 238-878-4
Beilstein/Reaxys No. N/A
Pubchem CID 24261
IUPAC Name Dioxosilane
SMILES O=[Si]=O
InchI Identifier InChI=1S/O2Si/c1-3-2
InchI Key VYPSYNLAJGMNEJ-UHFFFAOYSA-N

Packaging Specifications

Typical bulk packaging includes palletized plastic 5 gallon/25 kg. pails, fiber and steel drums to 1 ton super sacks in full container (FCL) or truck load (T/L) quantities. Research and sample quantities and hygroscopic, oxidizing or other air sensitive materials may be packaged under argon or vacuum. Shipping documentation includes a Certificate of Analysis and Safety Data Sheet (SDS). Solutions are packaged in polypropylene, plastic or glass jars up to palletized 440 gallon liquid totes, and 36,000 lb. tanker trucks.

Payment Methods

American Elements accepts checks, wire transfers, ACH, most major credit and debit cards (Visa, MasterCard, AMEX, Discover) and Paypal.

For the convenience of our international customers, American Elements offers the following additional payment methods:

SOFORT bank tranfer payment for Austria, Belgium, Germany and SwitzerlandJCB cards for Japan and WorldwideBoleto Bancario for BraziliDeal payments for the Netherlands, Germany, Austria, Belgium, Italy, Poland, Spain, Switzerland, and the United KingdomGiroPay for GermanyDankort cards for DenmarkElo cards for BrazileNETS for SingaporeCartaSi for ItalyCarte-Bleue cards for FranceChina UnionPayHipercard cards for BrazilTROY cards for TurkeyBC cards for South KoreaRuPay for India

Related Elements

Silicon

See more Silicon products. Silicon (atomic symbol: Si, atomic number: 14) is a Block P, Group 14, Period 3 element with an atomic weight of 28.085. Silicon Bohr MoleculeThe number of electrons in each of Silicon's shells is 2, 8, 4 and its electron configuration is [Ne] 3s2 3p2. The silicon atom has a radius of 111 pm and a Van der Waals radius of 210 pm. Silicon was discovered and first isolated by Jöns Jacob Berzelius in 1823. Silicon makes up 25.7% of the earth's crust, by weight, and is the second most abundant element, exceeded only by oxygen. The metalloid is rarely found in pure crystal form and is usually produced from the iron-silicon alloy ferrosilicon. Elemental SiliconSilica (or silicon dioxide), as sand, is a principal ingredient of glass, one of the most inexpensive of materials with excellent mechanical, optical, thermal, and electrical properties. Ultra high purity silicon can be doped with boron, gallium, phosphorus, or arsenic to produce silicon for use in transistors, solar cells, rectifiers, and other solid-state devices which are used extensively in the electronics industry.The name Silicon originates from the Latin word silex which means flint or hard stone.

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