Indium Tin Oxide Sputtering Target

CAS #:

Linear Formula:

In2O3·SnO2

MDL Number:

MFCD00171662

EC No.:

N/A

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PRODUCT Product Code ORDER SAFETY DATA TECHNICAL DATA
(2N) 99% Indium Tin Oxide Rotatable Sputtering Target
IN-SNO-02-STR
Pricing > SDS > Data Sheet >
(2N) 99% Indium Tin Oxide Sputtering Target
IN-SNO-02-ST
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(2N5) 99.5% Indium Tin Oxide Rotatable Sputtering Target
IN-SNO-025-STR
Pricing > SDS > Data Sheet >
(2N5) 99.5% Indium Tin Oxide Sputtering Target
IN-SNO-025-ST
Pricing > SDS > Data Sheet >
(3N) 99.9% Indium Tin Oxide Rotatable Sputtering Target
IN-SNO-03-STR
Pricing > SDS > Data Sheet >
(3N) 99.9% Indium Tin Oxide Sputtering Target
IN-SNO-03-ST
Pricing > SDS > Data Sheet >
(3N5) 99.95% Indium Tin Oxide Rotatable Sputtering Target
IN-SNO-035-STR
Pricing > SDS > Data Sheet >
(3N5) 99.95% Indium Tin Oxide Sputtering Target
IN-SNO-035-ST
Pricing > SDS > Data Sheet >
(4N) 99.99% Indium Tin Oxide Rotatable Sputtering Target
IN-SNO-04-STR
Pricing > SDS > Data Sheet >
(4N) 99.99% Indium Tin Oxide Sputtering Target
IN-SNO-04-ST
Pricing > SDS > Data Sheet >
(5N) 99.999% Indium Tin Oxide Rotatable Sputtering Target
IN-SNO-05-STR
Pricing > SDS > Data Sheet >
(5N) 99.999% Indium Tin Oxide Sputtering Target
IN-SNO-05-ST
Pricing > SDS > Data Sheet >

Indium Tin Oxide Sputtering Target Properties (Theoretical)

Compound Formula In2O5Sn
Molecular Weight 428.34
Appearance Pale yellow to greenish yellow
Melting Point 1526-1926 °C (2800–3500 °F)
Boiling Point N/A
Density 7.14 g/m3
Solubility in H2O N/A
Exact Mass 429.684524
Monoisotopic Mass 429.684524

Indium Tin Oxide Sputtering Target Health & Safety Information

Signal Word Warning
Hazard Statements H315-H319-H335
Hazard Codes Xi
Risk Codes 36/37/38
Safety Statements 26-36/37
RTECS Number N/A
Transport Information N/A
WGK Germany 3

View and Print SDS

SAFETY DATA SHEET

Date Accessed: 11/21/2024
Date Revised:01/15/2022

SECTION 1. IDENTIFICATION

Product Name: Indium Tin Oxide Sputtering Target

Product Number: All applicable American Elements product codes, e.g. IN-SNO-02-ST , IN-SNO-025-ST , IN-SNO-03-ST , IN-SNO-035-ST , IN-SNO-04-ST , IN-SNO-05-ST , IN-SNO-02-STR , IN-SNO-025-STR , IN-SNO-03-STR , IN-SNO-035-STR , IN-SNO-04-STR , IN-SNO-05-STR

CAS #: 50926-11-9

Relevant identified uses of the substance: Scientific research and development

Supplier details:
American Elements
10884 Weyburn Ave.
Los Angeles, CA 90024
Tel: +1 310-208-0551
Fax: +1 310-208-0351

Emergency telephone number:
Domestic, North America: +1 800-424-9300
International: +1 703-527-3887


SECTION 2. HAZARDS IDENTIFICATION

Classification of the substance or mixture
Classification according to Regulation (EC) No 1272/2008
GHS07
STOT SE 3 H335 May cause respiratory irritation.
Classification according to Directive 67/548/EEC or Directive 1999/45/EC
Xi; Irritant
R37: Irritating to respiratory system.
Information concerning particular hazards for human and environment:
N/A
Hazards not otherwise classified
No data available
Label elements
Labelling according to Regulation (EC) No 1272/2008
The substance is classified and labeled according to the CLP regulation.
Hazard pictograms

Exclamation Mark - GHS07

GHS07
Signal word
Warning
Hazard statements
H335 May cause respiratory irritation.
Precautionary statements
P261 Avoid breathing dust/fume/gas/mist/vapors/spray.
P304+P340 IF INHALED: Remove person to fresh air and keep comfortable for breathing.
P312 Call a POISON CENTER/doctor/.../if you feel unwell.
P405 Store locked up.
P403+P233 Store in a well-ventilated place. Keep container tightly closed.
P501 Dispose of contents/container in accordance with local/regional/
national/international regulations.
WHMIS classification
Not controlled
Classification system
HMIS ratings (scale 0-4)
(Hazardous Materials Identification System)
HEALTH
FIRE
REACTIVITY
1


Health (acute effects) = 1
Flammability = 0
Physical Hazard = 0
Other hazards
Results of PBT and vPvB assessment
PBT:
N/A
vPvB:
N/A


SECTION 3. COMPOSITION/INFORMATION ON INGREDIENTS

Substances
CAS No. / Substance Name:
50926-11-9 Indium tin oxide


SECTION 4. FIRST AID MEASURES

Description of first aid measures
If inhaled:
Supply patient with fresh air. If not breathing, provide artificial respiration. Keep patient warm.
Seek immediate medical advice.
In case of skin contact:
Immediately wash with soap and water; rinse thoroughly.
Seek immediate medical advice.
In case of eye contact:
Rinse opened eye for several minutes under running water. Consult a physician.
If swallowed:
Seek medical treatment.
Information for doctor
Most important symptoms and effects, both acute and delayed
No data available
Indication of any immediate medical attention and special treatment needed
No data available


SECTION 5. FIREFIGHTING MEASURES

Extinguishing media
Suitable extinguishing agents
Product is not flammable. Use fire-fighting measures that suit the surrounding fire.
Special hazards arising from the substance or mixture
If this product is involved in a fire, the following can be released:
Advice for firefighters
Protective equipment:
Wear self-contained respirator.
Wear fully protective impervious suit.


SECTION 6. ACCIDENTAL RELEASE MEASURES

Personal precautions, protective equipment and emergency procedures
Use personal protective equipment. Keep unprotected persons away.
Ensure adequate ventilation
Environmental precautions:
Do not allow material to be released to the environment without official permits.
Do not allow product to enter drains, sewage systems, or other water courses.
Do not allow material to penetrate the ground or soil.
Methods and materials for containment and cleanup:
Ensure adequate ventilation.
Prevention of secondary hazards:
No special measures required.
Reference to other sections
See Section 7 for information on safe handling
See Section 8 for information on personal protection equipment.
See Section 13 for disposal information.


SECTION 7. HANDLING AND STORAGE

Handling
Precautions for safe handling
Keep container tightly sealed.
Store in cool, dry place in tightly closed containers.
Ensure good ventilation at the workplace.
Information about protection against explosions and fires:
No data available
Conditions for safe storage, including any incompatibilities
Requirements to be met by storerooms and receptacles:
No special requirements.
Information about storage in one common storage facility:
Not required.
Further information about storage conditions:
Keep container tightly sealed.
Store in cool, dry conditions in well-sealed containers.
Specific end use(s)
No data available


SECTION 8. EXPOSURE CONTROLS/PERSONAL PROTECTION

Additional information about design of technical systems:
Properly operating chemical fume hood designed for hazardous chemicals and having an average face velocity of at least 100 feet per minute.
Control parameters
Components with limit values that require monitoring at the workplace:
Indium and compounds
mg/m3
ACGIH TLV 0.1(In)
Belgium TWA 0.1
Denmark TWA 0.1(In)
Finland TWA 0.1
Netherlands MAC-TGG 0.1
Norway TWA 0.1
Switzerland MAK-W 0.1
United Kingdom TWA 0.1(In); 0.3(In)-STEL
OSHA PEL TWA 0.1
Tin metal, tin oxide and inorganic tin compounds,
except tin hydride, as Sn
mg/m3
ACGIH TLV 2
Austria MAK 2
Belgium TWA 2
Denmark TWA 2
Finland TWA 2
Germany MAK 2
Hungary TWA 1; 2-STEL (skin)
Netherlands MAC-TGG 2
Norway TWA 1
Poland TWA 2
Switzerland MAK-W 2; 4-KZG-W
United Kingdom TWA 2; 4-STEL
USA PEL 2
Additional information:
No data
Exposure controls
Personal protective equipment
Follow typical protective and hygienic practices for handling chemicals.
Keep away from foodstuffs, beverages and feed.
Remove all soiled and contaminated clothing immediately.
Wash hands before breaks and at the end of work.
Maintain an ergonomically appropriate working environment.
Breathing equipment:
Use suitable respirator when high concentrations are present.
Protection of hands:
Impervious gloves
Inspect gloves prior to use.
Suitability of gloves should be determined both by material and quality, the latter of which may vary by manufacturer.
Eye protection:
Safety glasses
Body protection:
Protective work clothing.


SECTION 9. PHYSICAL AND CHEMICAL PROPERTIES

Information on basic physical and chemical properties
Appearance:
Form: Solid
Color: White
Odor: Odorless
Odor threshold: No data available.
pH: N/A
Melting point/Melting range: No data available
Boiling point/Boiling range: No data available
Sublimation temperature / start: No data available
Flash point: N/A
Flammability (solid, gas)
Product is not flammable.
Ignition temperature: No data available
Decomposition temperature: No data available
Autoignition: No data available.
Danger of explosion: Product does not present an explosion hazard.
Explosion limits:
Lower: No data available
Upper: No data available
Vapor pressure: N/A
Density: No data available
Relative density
No data available.
Vapor density
N/A
Evaporation rate
N/A
Solubility in Water (H2O): Insoluble
Partition coefficient (n-octanol/water): No data available.
Viscosity:
Dynamic: N/A
Kinematic: N/A
Other information
No data available


SECTION 10. STABILITY AND REACTIVITY

Reactivity
No data available
Chemical stability
Stable under recommended storage conditions.
Thermal decomposition / conditions to be avoided:
Decomposition will not occur if used and stored according to specifications.
Possibility of hazardous reactions
No dangerous reactions known
Conditions to avoid
No data available
Incompatible materials:
No data available
Hazardous decomposition products:
No decomposition products known.


SECTION 11. TOXICOLOGICAL INFORMATION

Information on toxicological effects
Acute toxicity:
No effects known.
LD/LC50 values that are relevant for classification:
No data
Skin irritation or corrosion:
Irritant to skin and mucous membranes.
Eye irritation or corrosion:
Irritating effect.
Sensitization:
No sensitizing effects known.
Germ cell mutagenicity:
No effects known.
Carcinogenicity:
No classification data on carcinogenic properties of this material is available from the EPA, IARC, NTP, OSHA or ACGIH.
Reproductive toxicity:
No effects known.
Specific target organ system toxicity - repeated exposure:
No effects known.
Specific target organ system toxicity - single exposure:
May cause respiratory irritation.
Aspiration hazard:
No effects known.
Subacute to chronic toxicity:
Exposure to indium compounds may cause pain in the joints and bones, tooth decay, nervous and gastrointestinal disorders, heart pain and general debility.
Experiments with animals also indicate that indium may cause reduced food and water consumption with weight loss, pulmonary edema, pneumonia, blood, liver and kidney damage, leg paralysis and damage to the brain, heart, adrenals and spleen.
Metallic tin and inorganic tin compounds may cause nausea, vomiting, diarrhea, irritation and pneumoconiosis.
Subacute to chronic toxicity:
No effects known.
Additional toxicological information:
To the best of our knowledge the acute and chronic toxicity of this substance is not fully known.


SECTION 12. ECOLOGICAL INFORMATION

Toxicity
Aquatic toxicity:
No data available
Persistence and degradability
No data available
Bioaccumulative potential
No data available
Mobility in soil
No data available
Additional ecological information:
Do not allow material to be released to the environment without official permits.
Avoid transfer into the environment.
Results of PBT and vPvB assessment
PBT:
N/A
vPvB:
N/A
Other adverse effects
No data available


SECTION 13. DISPOSAL CONSIDERATIONS

Waste treatment methods
Recommendation
Consult official regulations to ensure proper disposal.
Uncleaned packagings:
Recommendation:
Disposal must be made according to official regulations.


SECTION 14. TRANSPORT INFORMATION

Not a hazardous material for transportation.
UN-Number
DOT, IMDG, IATA
None
UN proper shipping name
DOT, IMDG, IATA
None
Transport hazard class(es)
DOT, ADR, IMDG, IATA
Class
None
Packing group
DOT, IMDG, IATA
None
Environmental hazards:
N/A
Special precautions for user
N/A
Transport in bulk according to Annex II of MARPOL73/78 and the IBC Code
N/A
Transport/Additional information:
Not dangerous according to the above specifications.
DOT
Marine Pollutant (DOT):
No


SECTION 15. REGULATORY INFORMATION

Safety, health and environmental regulations/legislation specific for the substance or mixture
National regulations
All components of this product are listed in the U.S. Environmental Protection Agency Toxic Substances Control Act Chemical substance Inventory.
All components of this product are listed on the Canadian Non-Domestic Substances List (NDSL).
SARA Section 313 (specific toxic chemical listings)
Substance is not listed.
California Proposition 65
Prop 65 - Chemicals known to cause cancer
Substance is not listed.
Prop 65 - Developmental toxicity
Substance is not listed.
Prop 65 - Developmental toxicity, female
Substance is not listed.
Prop 65 - Developmental toxicity, male
Substance is not listed.
Information about limitation of use:
For use only by technically qualified individuals.
Other regulations, limitations and prohibitive regulations
Substance of Very High Concern (SVHC) according to the REACH Regulations (EC) No. 1907/2006.
Substance is not listed.
The conditions of restrictions according to Article 67 and Annex XVII of the Regulation (EC) No 1907/2006 (REACH) for the manufacturing, placing on the market and use must be observed.
Substance is not listed.
Annex XIV of the REACH Regulations (requiring Authorisation for use)
Substance is not listed.
REACH - Pre-registered substances
Substance is listed.
Chemical safety assessment:
A Chemical Safety Assessment has not been carried out.


SECTION 16. OTHER INFORMATION

Safety Data Sheet according to Regulation (EC) No. 1907/2006 (REACH). The above information is believed to be correct but does not purport to be all inclusive and shall be used only as a guide. The information in this document is based on the present state of our knowledge and is applicable to the product with regard to appropriate safety precautions. It does not represent any guarantee of the properties of the product. American Elements shall not be held liable for any damage resulting from handling or from contact with the above product. See reverse side of invoice or packing slip for additional terms and conditions of sale. COPYRIGHT 1997-2022 AMERICAN ELEMENTS. LICENSED GRANTED TO MAKE UNLIMITED PAPER COPIES FOR INTERNAL USE ONLY.

About Indium Tin Oxide Sputtering Target

American Elements specializes in producing high purity Indium Tin Oxide (ITO) Sputtering Targets with the highest possible density and smallest possible average grain sizes for use in semiconductor, chemical vapor deposition (CVD) and physical vapor deposition (PVD) display and optical applications. Our standard Sputtering Targets for thin film are available monoblock or bonded with planar target dimensions and configurations up to 820 mm with hole drill locations and threading, beveling, grooves and backing designed to work with both older sputtering devices as well as the latest process equipment, such as large area coating for solar energy or fuel cells and flip-chip applications. Research sized targets are also produced as well as custom sizes and alloys. All targets are analyzed using best demonstrated techniques including X-Ray Fluorescence (XRF), Glow Discharge Mass Spectrometry (GDMS), and Inductively Coupled Plasma (ICP). "Sputtering" allows for thin film deposition of an ultra high purity sputtering metallic or oxide material onto another solid substrate by the controlled removal and conversion of the target material into a directed gaseous/plasma phase through ionic bombardment. Materials are produced using crystallization, solid state and other ultra high purification processes such as sublimation. American Elements specializes in producing custom compositions for commercial and research applications and for new proprietary technologies. American Elements also casts any of the rare earth metals and most other advanced materials into rod, bar, or plate form, as well as other machined shapes and through other processes such as nanoparticles and in the form of solutions and organometallics. We also produce Indium as disc, granules, ingot, pellets, pieces, powder, and rod. Other shapes are available by request. American Elements produces to many standard grades when applicable, including Mil Spec (military grade); ACS, Reagent and Technical Grade; Food, Agricultural and Pharmaceutical Grade; Optical Grade, USP and EP/BP (European Pharmacopeia/British Pharmacopeia) and follows applicable ASTM testing standards.

Indium Tin Oxide Sputtering Target Synonyms

ITO, tin-doped indium oxide, indium oxide/tin oxide, In2O3:SnO2; 90:10 wt%, CAS 71243-84-0, In.O.Sn, In1.69Sn0.15O2.85

Chemical Identifiers

Linear Formula In2O3·SnO2
MDL Number MFCD00171662
EC No. N/A
Beilstein/Reaxys No. N/A
Pubchem CID 16217324
IUPAC Name dioxotin; oxo(oxoindig anyloxy)indigane
SMILES O=[In]O[In]=O.O=[Sn]=O
InchI Identifier InChI=1S/2In.5O.Sn
InchI Key LNNWKAUHKIHCKO-UHFFFAOYSA-N

Packaging Specifications

Typical bulk packaging includes palletized plastic 5 gallon/25 kg. pails, fiber and steel drums to 1 ton super sacks in full container (FCL) or truck load (T/L) quantities. Research and sample quantities and hygroscopic, oxidizing or other air sensitive materials may be packaged under argon or vacuum. Shipping documentation includes a Certificate of Analysis and Safety Data Sheet (SDS). Solutions are packaged in polypropylene, plastic or glass jars up to palletized 440 gallon liquid totes, and 36,000 lb. tanker trucks.

Payment Methods

American Elements accepts checks, wire transfers, ACH, most major credit and debit cards (Visa, MasterCard, AMEX, Discover) and Paypal.

For the convenience of our international customers, American Elements offers the following additional payment methods:

SOFORT bank tranfer payment for Austria, Belgium, Germany and SwitzerlandJCB cards for Japan and WorldwideBoleto Bancario for BraziliDeal payments for the Netherlands, Germany, Austria, Belgium, Italy, Poland, Spain, Switzerland, and the United KingdomGiroPay for GermanyDankort cards for DenmarkElo cards for BrazileNETS for SingaporeCartaSi for ItalyCarte-Bleue cards for FranceChina UnionPayHipercard cards for BrazilTROY cards for TurkeyBC cards for South KoreaRuPay for India

Related Elements

Indium

See more Indium products. Indium (atomic symbol: In, atomic number: 49) is a Block P, Group 13, Period 5 element with an atomic weight of 114.818. The number of electrons in each of indium's shells is [2, 8, 18, 18, 3] and its electron configuration is [Kr] 4d10 5s2 5p1. The indium atom has a radius of 162.6 pm and a Van der Waals radius of 193 pm. Indium was discovered by Ferdinand Reich and Hieronymous Theodor Richter in 1863. Indium Bohr ModelIt is a relatively rare, extremely soft metal is a lustrous silvery gray and is both malleable and easily fusible. It has similar chemical properties to Elemental Indiumgallium such as a low melting point and the ability to wet glass. Fields such as optics and microelectronics that utilize semiconductor technology have wide uses for indium, especially in the form of Indiun Tin Oxide (ITO). Thin films of Copper Indium Gallium Selenide (CIGS) are used in high-performing solar cells. Indium's name is derived from the Latin word indicum, meaning violet.

Tin

Tin Bohr ModelSee more Tin products. Tin (atomic symbol: Sn, atomic number: 50) is a Block P, Group 14, Period 5 element with an atomic weight of 118.710. The number of electrons in each of tin's shells is 2, 8, 18, 18, 4 and its electron configuration is [Kr] 4d10 5s2 5p2. The tin atom has a radius of 140.5 pm and a Van der Waals radius of 217 pm.In its elemental form, tin has a silvery-gray metallic appearance. It is malleable, ductile and highly crystalline. High Purity (99.9999%) Tin (Sn) MetalTin has nine stable isotopes and 18 unstable isotopes. Under 3.72 degrees Kelvin, Tin becomes a superconductor. Applications for tin include soldering, plating, and such alloys as pewter. The first uses of tin can be dated to the Bronze Age around 3000 BC in which tin and copper were combined to make the alloy bronze. The origin of the word tin comes from the Latin word Stannum which translates to the Anglo-Saxon word tin. For more information on tin, including properties, safety data, research, and American Elements' catalog of tin products, visit the Tin element page.

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