Silicon Oxide Sputtering Target

CAS #:

Linear Formula:

SiO2

MDL Number:

MFCD00011232

EC No.:

262-373-8

ORDER

PRODUCT Product Code ORDER SAFETY DATA TECHNICAL DATA
(3N) 99.9% Silicon Oxide Sputtering Target
SI-OX-03-ST
Pricing > SDS > Data Sheet >
(4N) 99.99% Silicon Oxide Sputtering Target
SI-OX-04-ST
Pricing > SDS > Data Sheet >
(5N) 99.999% Silicon Oxide Sputtering Target
SI-OX-05-ST
Pricing > SDS > Data Sheet >

Silicon Oxide Sputtering Target Properties (Theoretical)

Compound Formula O2Si
Molecular Weight 60.09
Appearance White Target
Melting Point 1,600° C (2,912° F)
Boiling Point 2,230° C (4,046° F)
Density 2533 kg/m-3
Solubility in H2O N/A
Exact Mass 59.9668 g/mol
Monoisotopic Mass 59.967 Da

Silicon Oxide Sputtering Target Health & Safety Information

Signal Word Danger
Hazard Statements H350-H373
Hazard Codes N/A
Precautionary Statements P260-P201-P281-P202-P308+P313-P314-P405-P501a
Flash Point Not applicable
Risk Codes N/A
Safety Statements N/A
RTECS Number N/A
Transport Information NONH
WGK Germany NONH
GHS Pictograms

View and Print SDS

SAFETY DATA SHEET

Date Accessed: 12/22/2024
Date Revised:01/15/2022

SECTION 1. IDENTIFICATION

Product Name: Silicon Oxide Sputtering Target

Product Number: All applicable American Elements product codes, e.g. SI-OX-03-ST , SI-OX-04-ST , SI-OX-05-ST

CAS #: 7631-86-9

Relevant identified uses of the substance: Scientific research and development

Supplier details:
American Elements
10884 Weyburn Ave.
Los Angeles, CA 90024
Tel: +1 310-208-0551
Fax: +1 310-208-0351

Emergency telephone number:
Domestic, North America: +1 800-424-9300
International: +1 703-527-3887


SECTION 2. HAZARDS IDENTIFICATION

Classification of the substance or mixture
GHS Classification in accordance with 29 CFR 1910 (OSHA HCS)
Specific target organ toxicity - repeated exposure (Category 1), H372

Health Hazard - GHS08

Signal word: Danger
Hazard statement(s)
H372
Causes damage to organs through prolonged or repeated exposure.
Precautionary statement(s)
P260
Do not breathe dust/ fume/ gas/ mist/ Vapors/ spray.
P264
Wash skin thoroughly after handling.
P270
Do not eat, drink or smoke when using this product.
P314
Get medical advice/ attention if you feel unwell.
P501
Dispose of contents/ container to an approved waste disposal plant


SECTION 3. COMPOSITION/INFORMATION ON INGREDIENTS

Substances
Synonyms: Silicon dioxide
Formula: O2Si
Molecular Weight: 60.08 g/mol
CAS-No.: 7631-86-9
EC-No.: 231-545-4
Hazardous components
Component: Silicon dioxide
Classification: STOT RE1; H372
Concentration: 90-100%


SECTION 4. FIRST AID MEASURES

Description of first aid measures
General advice
Consult a physician. Show this safety data sheet to the doctor in attendance.
Move out of dangerous area.
If inhaled
If breathed in, move person into fresh air. If not breathing, give artificial respiration. Consult a physician.
In case of skin contact
Wash off with soap and plenty of water. Consult a physician.
In case of eye contact
Flush eyes with water as a precaution.
If swallowed
Never give anything by mouth to an unconscious person. Rinse mouth with water. Consult a physician.
Most important symptoms and effects, both acute and delayed
The most important known symptoms and effects are described in the labelling (see section 2.2) and/or in section 11
Indication of any immediate medical attention and special treatment needed: no data available


SECTION 5. FIREFIGHTING MEASURES

Extinguishing media
Suitable extinguishing media
Use water spray, alcohol-resistant foam, dry chemical or carbon dioxide.
Special hazards arising from the substance or mixture
silicon oxides
Advice for firefighters
Wear self contained breathing apparatus for fire fighting if necessary.
Further information
no data available


SECTION 6. ACCIDENTAL RELEASE MEASURES

Personal precautions, protective equipment and emergency procedures
Use personal protective equipment. Avoid dust formation. Avoid breathing Vapors, mist or gas. Avoid breathing dust.
For personal protection see section 8.
Environmental precautions
Do not let product enter drains.
Methods and materials for containment and cleaning up
Pick up and arrange disposal without creating dust. Sweep up and shovel. Keep in suitable, closed containers for disposal.
Reference to other sections
For disposal see section 13.


SECTION 7. HANDLING AND STORAGE

Precautions for safe handling
Avoid formation of dust and aerosols.
Provide appropriate exhaust ventilation at places where dust is formed.
For precautions see section 2.2.
Conditions for safe storage, including any incompatibilities
Keep container tightly closed in a dry and well-ventilated place.
Specific end use(s)
Apart from the uses mentioned in section 1.2 no other specific uses are stipulated


SECTION 8. EXPOSURE CONTROLS/PERSONAL PROTECTION

Exposure controls
Appropriate engineering controls
Handle in accordance with good industrial hygiene and safety practice. Wash hands before breaks and at the end of workday.
Personal protective equipment
Eye/face protection
Use equipment for eye protection tested and approved under appropriate government standards such as NIOSH (US) or EN 166(EU).
Skin protection
Handle with gloves. Gloves must be inspected prior to use. Use proper glove removal technique (without touching glove's outer surface) to avoid skin contact with this product. Dispose of contaminated gloves after use in accordance with applicable laws and good laboratory practices. Wash and dry hands.
Body Protection
Choose body protection in relation to its type, to the concentration and amount of dangerous substances, and to the specific work-place., The type of protective equipment must be selected according to the concentration and amount of the dangerous substance at the specific workplace.
Respiratory protection
Respiratory protection is not required. Where protection from nuisance levels of dusts are desired, use type N95 (US) or type P1 (EN 143) dust masks. Use respirators and components tested and approved under appropriate government standards such as NIOSH (US) or CEN (EU).
Control of environmental exposure
Do not let product enter drains.


SECTION 9. PHYSICAL AND CHEMICAL PROPERTIES

Information on basic physical and chemical properties
Appearance
Form: solid
Odor: no data available
Odor Threshold: no data available
pH: no data available
Melting point/freezing point
Melting point/range: > 1,600 °C (> 2,912 °F)
Initial boiling point and boiling range: 2,230 °C (4,046 °F)
Flash point: no data available
EVaporation rate: no data available
Flammability (solid, gas): no data available
Upper/lower flammability or explosive limits: no data available
Vapor pressure: no data available
Vapor density: no data available
Relative density: 2.600 g/cm3
Water solubility: insoluble
Partition coefficient: n-octanol/water: no data available
Auto-ignition temperature: no data available
Decomposition temperature: no data available
Viscosity: no data available
Explosive properties: no data available
Oxidizing properties: no data available
Other safety information: no data available


SECTION 10. STABILITY AND REACTIVITY

Reactivity: no data available
Chemical stability
Stable under recommended storage conditions.
Possibility of hazardous reactions: no data available
Conditions to avoid: no data available
Incompatible materials
Strong oxidizing agents
Hazardous decomposition products
In the event of fire: see section 5


SECTION 11. TOXICOLOGICAL INFORMATION

Information on toxicological effects
Acute toxicity
LD50 Oral - rat - 3,160 mg/kg
Inhalation: no data available
Dermal:
no data available
no data available
Skin corrosion/irritation: no data available
Serious eye damage/eye irritation: no data available
Respiratory or skin sensitisation: no data available
Germ cell mutagenicity
rat
Unscheduled DNA synthesis
Carcinogenicity
Carcinogenicity - rat - Inhalation
Tumorigenic:Carcinogenic by RTECS criteria. Lungs, Thorax, or Respiration:Tumors.
This product is or contains a component that is not classifiable as to its carcinogenicity based on its IARC, ACGIH, NTP, or EPA classification.
IARC: 3 - Group 3: Not classifiable as to its carcinogenicity to humans (Silicon dioxide)
ACGIH:
No component of this product present at levels greater than or equal to 0.1% is identified as a carcinogen or potential carcinogen by ACGIH.
NTP:
No component of this product present at levels greater than or equal to 0.1% is identified as a known or anticipated carcinogen by NTP.
OSHA:
No component of this product present at levels greater than or equal to 0.1% is identified as a carcinogen or potential carcinogen by OSHA.
Reproductive toxicity
no data available
no data available
Specific target organ toxicity - single exposure: no data available
Specific target organ toxicity - repeated exposure: no data available
The substance or mixture is classified as specific target organ toxicant, repeated exposure, category 1.
Aspiration hazard: no data available
Additional Information
RTECS: Not available
To the best of our knowledge, the chemical, physical, and toxicological properties have not been thoroughly investigated.
Stomach - Irregularities - Based on Human Evidence
Stomach - Irregularities - Based on Human Evidence


SECTION 12. ECOLOGICAL INFORMATION

Toxicity
no data available
Persistence and degradability: no data available
Bioaccumulative potential: no data available
Mobility in soil: no data available
Results of PBT and vPvB assessment
PBT/vPvB assessment not available as chemical safety assessment not required/not conducted
Other adverse effects: no data available


SECTION 13. DISPOSAL CONSIDERATIONS

Waste treatment methods
Product
Offer surplus and non-recyclable solutions to a licensed disposal company.
Contaminated packaging
Dispose of as unused product.


SECTION 14. TRANSPORT INFORMATION

DOT (US)
Not dangerous goods
IMDG
Not dangerous goods
IATA
Not dangerous goods


SECTION 15. REGULATORY INFORMATION

SARA 302
Components
SARA 302: No chemicals in this material are subject to the reporting requirements of SARA Title III, Section 302.
SARA 313
Components
SARA 313: This material does not contain any chemical components with known CAS numbers that exceed the threshold (De Minimis) reporting levels established by SARA Title III, Section 313.
SARA 311/312
Hazards
Chronic Health Hazard
Massachusetts Right To Know
Components
Silicon dioxide
CAS-No.: 7631-86-9
Revision Date: 1993-04-24
Pennsylvania Right To Know Components
Silicon dioxide
CAS-No.:7631-86-9
Revision Date: 1993-04-24
New Jersey Right To Know Components
Silicon dioxide
CAS-No.: 7631-86-9
Revision Date: 1993-04-24
California Prop. 65
Components
This product does not contain any chemicals known to State of California to cause cancer, birth defects, or any other reproductive harm


SECTION 16. OTHER INFORMATION

Safety Data Sheet according to Regulation (EC) No. 1907/2006 (REACH). The above information is believed to be correct but does not purport to be all inclusive and shall be used only as a guide. The information in this document is based on the present state of our knowledge and is applicable to the product with regard to appropriate safety precautions. It does not represent any guarantee of the properties of the product. American Elements shall not be held liable for any damage resulting from handling or from contact with the above product. See reverse side of invoice or packing slip for additional terms and conditions of sale. COPYRIGHT 1997-2022 AMERICAN ELEMENTS. LICENSED GRANTED TO MAKE UNLIMITED PAPER COPIES FOR INTERNAL USE ONLY.

About Silicon Oxide Sputtering Target

Oxide IonAmerican Elements specializes in producing high purity Silicon oxide sputtering targets with the highest possible density High Purity (99.999%) Silicon Oxide Sputtering Targetand smallest possible average grain sizes for use in semiconductor, chemical vapor deposition (CVD) and physical vapor deposition (PVD) display and optical applications. Our standard Sputtering Targets for thin film are available monoblock or bonded with planar target dimensions and configurations up to 820 mm with hole drill locations and threading, beveling, grooves and backing designed to work with both older sputtering devises as well as the latest process equipment, such as large area coating for solar energy or fuel cells and flip-chip applications. Research sized targets are also produced as well as custom sizes and alloys. All targets are analyzed using best demonstrated techniques including X-Ray Fluorescence (XRF), Glow Discharge Mass Spectrometry (GDMS), and Inductively Coupled Plasma (ICP). "Sputtering" allows for thin film deposition of an ultra high purity sputtering metallic or oxide material onto another solid substrate by the controlled removal and conversion of the target material into a directed gaseous/plasma phase through ionic bombardment. We can also provide targets outside this range in addition to just about any size rectangular, annular, or oval target. Materials are produced using crystallization, solid state and other ultra high purification processes such as sublimation. American Elements specializes in producing custom compositions for commercial and research applications and for new proprietary technologies. American Elements also casts any of the rare earth metals and most other advanced materials into rod, bar, or plate form, as well as other machined shapes and through other processes such as nanoparticles and in the form of solutions and organometallics. We also produce Silicon Oxide as rods, powder and plates. Oxide compounds are not conductive to electricity. However, certain perovskite structured oxides are electronically conductive finding application in the cathode of solid oxide fuel cells and oxygen generation systems. Other shapes are available by request.

Silicon Oxide Sputtering Target Synonyms

Silicon Dioxide, Quartz, silane, dioxo, Silicon (IV) Oxide, Cristobalite, Silica, Crystalline silica, Dioxosilane, Sand

Chemical Identifiers

Linear Formula SiO2
MDL Number MFCD00011232
EC No. 262-373-8
Beilstein/Reaxys No. N/A
Pubchem CID N/A
IUPAC Name Dioxosilane
SMILES O=[Si]=O
InchI Identifier InChI=1S/O2Si/c1-3-2
InchI Key VYPSYNLAJGMNEJ-UHFFFAOYSA-N

Packaging Specifications

Typical bulk packaging includes palletized plastic 5 gallon/25 kg. pails, fiber and steel drums to 1 ton super sacks in full container (FCL) or truck load (T/L) quantities. Research and sample quantities and hygroscopic, oxidizing or other air sensitive materials may be packaged under argon or vacuum. Shipping documentation includes a Certificate of Analysis and Safety Data Sheet (SDS). Solutions are packaged in polypropylene, plastic or glass jars up to palletized 440 gallon liquid totes, and 36,000 lb. tanker trucks.

Payment Methods

American Elements accepts checks, wire transfers, ACH, most major credit and debit cards (Visa, MasterCard, AMEX, Discover) and Paypal.

For the convenience of our international customers, American Elements offers the following additional payment methods:

SOFORT bank tranfer payment for Austria, Belgium, Germany and SwitzerlandJCB cards for Japan and WorldwideBoleto Bancario for BraziliDeal payments for the Netherlands, Germany, Austria, Belgium, Italy, Poland, Spain, Switzerland, and the United KingdomGiroPay for GermanyDankort cards for DenmarkElo cards for BrazileNETS for SingaporeCartaSi for ItalyCarte-Bleue cards for FranceChina UnionPayHipercard cards for BrazilTROY cards for TurkeyBC cards for South KoreaRuPay for India

Related Elements

Silicon

See more Silicon products. Silicon (atomic symbol: Si, atomic number: 14) is a Block P, Group 14, Period 3 element with an atomic weight of 28.085. Silicon Bohr MoleculeThe number of electrons in each of Silicon's shells is 2, 8, 4 and its electron configuration is [Ne] 3s2 3p2. The silicon atom has a radius of 111 pm and a Van der Waals radius of 210 pm. Silicon was discovered and first isolated by Jöns Jacob Berzelius in 1823. Silicon makes up 25.7% of the earth's crust, by weight, and is the second most abundant element, exceeded only by oxygen. The metalloid is rarely found in pure crystal form and is usually produced from the iron-silicon alloy ferrosilicon. Elemental SiliconSilica (or silicon dioxide), as sand, is a principal ingredient of glass, one of the most inexpensive of materials with excellent mechanical, optical, thermal, and electrical properties. Ultra high purity silicon can be doped with boron, gallium, phosphorus, or arsenic to produce silicon for use in transistors, solar cells, rectifiers, and other solid-state devices which are used extensively in the electronics industry.The name Silicon originates from the Latin word silex which means flint or hard stone.

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